2013 Fiscal Year Final Research Report
Investigation of high brightness property of Li-LMES for nano-focued X-ray microscope
| Project/Area Number |
23360021
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Thin film/Surface and interfacial physical properties
|
|---|
| Research Institution | Mie University |
|---|
Principal Investigator |
HATA Koichi 三重大学, 工学(系)研究科(研究院), 教授 (30228465)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
NAGAI Shigekazu 三重大学, 大学院工学研究科, 助教 (40577970)
|
|---|
| Co-Investigator(Renkei-kenkyūsha) |
OKADA Tomoyuki 浜松ホトニクス株式会社, 電子管事業部, 専任部員 (50394151)
YABUSHITA Ryosuke 浜松ホトニクス株式会社, 電子管事業部, 部員 (80573005)
|
|---|
| Project Period (FY) |
2011-04-01 – 2014-03-31
|
| Keywords | Taylorコーン / Ｘ線顕微鏡 / リチウム / 液体金属電子源 / 超高真空走査型電子顕微鏡 / 電界放射型陰極 |
|---|
| Research Abstract |
In this study, we verified emission properties of Lithium liquid metal electron source (Li-LMES) as one of candidate of electron source for high-resolution X-ray microscope used in a field of nanotechnology. Our newly developed an X-ray microscope equipped with Li-LMES. Under condition of the acceleration voltage of 7 kV, the target current of 14 nA could be obtained by using Li-LMES, which value is three orders of magnitude higher than a conventional W field-emitter due to high current density of Li-LMES. The value of the target current was not enough to establish a contrast for X-ray imaging. For getting time-resolved X-ray images, we must consider new electron optics with higher transparency.
|
Research Products
(2 results)
