2013 Fiscal Year Final Research Report
Development of Lead-Free Biocompatible Multi-Layer Thin-film Structure Generation Technology for Implantable Actuator and Energy Harvest Device
| Project/Area Number |
23360059
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Doshisha University |
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Principal Investigator |
NAKAMACHI Eiji 同志社大学, 生命医科学部, 教授 (60099893)
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| Co-Investigator(Kenkyū-buntansha) |
KENMOTSU Takahiro 同志社大学, 生命医科学部, 准教授 (10389009)
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| Project Period (FY) |
2011 – 2013
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| Keywords | 分子材料設計 / 創製プロセス最適化 / 圧電特性 / 生体適合 / 第一原理計算 / アクチュエータ / 発電デバイス / スパッタ成膜 |
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| Research Abstract |
We developed a lead-free biocompatible multi-layer thin-film structure generation technology for implantable actuator and energy harvest device, as demonstrated below: (1) Piezoelectric stress constants of designed mixed crystals, Ti doped MSO, obtained by the first-principle calculations was 0.696(C/m2), which is 1.52 times larger than MSO. Piezoelectric constant d33 was 354.8pm/V. (2) Optimum post-annealing temperature was obtained as 676 centigrade, its crystallization of tetragonal MgSiO3 was 90.5%.High crystallization of tetragonal MgSiO3 was obtained on generated ten-layered thin film. Its piezoelectric constant d33 was 406.1 pm/V. (3) Mono-morph MSO cantilever actuator could be vibrated with the amplitude tens nm under 15 Voltage. (4) A magnetic induced hybrid vibration energy harvester, which employed the mono-morph MSO and PVDF piezoelectric cantilever, generated 1.2 microW. We confirmed that this device can provide a sufficient power for implantable Bio-MEMS device.
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