2013 Fiscal Year Annual Research Report
“軟脆”特徴を持つ高機能材料の無欠陥表面創成加工技術と評価技術に関する研究
| Project/Area Number |
23360062
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| Research Institution | Ibaraki University |
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Principal Investigator |
周 立波 茨城大学, 工学部, 教授 (90235705)
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| Co-Investigator(Kenkyū-buntansha) |
清水 淳 茨城大学, 工学部, 教授 (40292479)
山本 武幸 茨城大学, 工学部, 技術職員 (40396594)
小貫 哲平 茨城大学, 工学部, 准教授 (70400447)
尾嶌 裕隆 茨城大学, 工学部, 講師 (90375361)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Keywords | 軟脆材料 / 焦電効果 / 圧電効果 / 研削加工 / 研削熱の影響 |
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| Research Abstract |
As a typical multi-functional single crystal material, Lithium tantalate (LiTaO3 or LT) exhibits its excellent electro-optical, pyroelectric and piezoelectric properties, and has now been widely applied into many applications, especially in the telecommunication field. However, the most critical issue in the process is its pyroelectric effect and piezoelectric effect which potentially leads to crack initiation during grinding. Because it is rich in plasticity, LT demands larger specific energy for material removal. As the most machining energy is eventually converted into heat, LT undergoes a rapid rise in temperature during the grinding process, thus highly risks in thermal shock. In order to clarify the thermal influence on the grinding process of LiTaO3, the effects of coolant temperature, diamond grinding wheel geometry and material of substrate are investigated in this research. The experimental results show that the increasing rate of grinding torque (or force) and surface roughness are two major factors dominating the crack initiation during grinding of LT wafers. Via a DOE (design of experiment) analysis, coolant temperature and wheel type stand out as the main factors influencing on the increasing rate and wafer surface roughness.
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| Current Status of Research Progress |
Reason
25年度が最終年度であるため、記入しない。
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| Strategy for Future Research Activity |
25年度が最終年度であるため、記入しない。
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