2013 Fiscal Year Final Research Report
Piezoelectric thick film more than 100 miro-meters deposited by the ultrasonic assisted hydrothermal method
| Project/Area Number |
23360134
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | The University of Tokyo |
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Principal Investigator |
MORITA Takeshi 東京大学, 新領域創成科学研究科, 准教授 (60344735)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Keywords | 厚膜 / 強誘電・圧電薄膜合成技術 |
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| Research Abstract |
For medical ultrasonic devices and micro piezoelectric actuators, thick piezoelectric films are strongly demanded. In the conventional piezoelectric film deposition processes, the thickness have been limited because the crack was easily made inside the film due to high temperature crystallization process more than 600 degree C.
In this study, we focused on the hydrothermal method whose reaction temperature is 250 degree C. By developing the ultrasonic assisted hydrothermal method, we demonstrated a 172 micrometer thickness of potassium niobate film.
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