Nanoprocessing of surface photonic elements with high intensity scattered near-field excited by femtosecond laser

2013 Fiscal Year Final Research Report

• Project/Area Number: 23360161
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Keio University
• Principal Investigator: OBARA Minoru 慶應義塾大学, 理工学部, 名誉教授 (90101998)
• Co-Investigator(Kenkyū-buntansha): SAIKI Toshiharu 慶應義塾大学, 理工学部, 教授 (70261196) ; TSUDA Hiroyuki 慶應義塾大学, 理工学部, 教授 (90327677) ; TERAKAWA Mitsuhiro 慶應義塾大学, 理工学部, 専任講師 (60580090)
• Project Period (FY): 2011-04-01 – 2014-03-31
• Keywords: ナノプロセシング / ミー散乱 / 表面プラズモニック散乱 / 散乱近接場・遠方場 / フェムト秒レーザー / 表面周期構造 / FDTD法

Research Abstract

An enhanced near-field scattered from nanostructures is localized to the nano-scale zone, and is then used for nano-ablation processing of a variety of advanced functional materials. This report presents theoretically and experimentally the characteristics of near-field and nano-ablation in terms of femtosecond laser polarization, irradiation angles, scattering structures, scattering materials, work materials. Near-fields from plasmonic scattering and Mie scattering are clearly explained. In addition to the enhanced near-field processing, the mechanism of surface ripples formed by the interference of the incident femtosecond laser and the scattered far-field light is well explained by using the 3D FDTD method. The nano-patterned surfaces fabricated these methods can potentially be used for surface photonic devices.

Research Products

• [Journal Article] Electron excitation effect on scattering near-field and far-field ablation material processing by femtosecond laser irradiation (2014)
  • Author(s): T. Enami, G. Obara, M. Terakawa, M. Obara
  • Journal Title: Applied Physics A Volume: 114 Pages: 253-259
  • DOI: 10.1007/s00339-013-8096-2
  • Peer Reviewed
• [Journal Article] Growth of high spatial frequency periodic ripple structures on SiC crystal surfaces irradiated with successive femtosecond laser pulses (2013)
  • Author(s): G. Obara, H. Shimizu, T. Enami, E. Mazur, M. Terakawa, M. Obara
  • Journal Title: Optics Express 21 Pages: 26323-26334
  • DOI: 10.1364/OE.21.026323
  • Peer Reviewed
• [Journal Article] Evolution of femtosecond laserinduced surface ripples on lithium niobate crystal surfaces (2013)
  • Author(s): H. Shimizu, G. Obara, M. Terakawa, M. Obara
  • Journal Title: Applied Physics Express 6 Pages: 112701/1-3
  • DOI: 10.7567/APEX.6.112701
  • Peer Reviewed
• [Journal Article] Plasmonic nanometric optical tweezers in an asymmetric space of gold nanostructured substrates (2013)
  • Author(s): K. Hirano, H. Shimizu, T. Enami, M. Terakawa, M. Obara, N. N. Nedyalkov, P. A. Atanasov
  • Journal Title: Journal of Nanotechnology in Diagnosis and Treatment Volume: 1 Pages: 2-10
  • DOI: 10.12974/2311-8792.2013.01.01.1
  • Peer Reviewed
• [Journal Article] Tuning the optical properties of gold nanostructures fabricated on flexible substrates (2013)
  • Author(s): R. Nikova, N. Nedyalkova, P.A. Atanasova, M. Terakawa, H. Shimizu, and M. Obara
  • Journal Title: Applied Surface Sciences Volume: 264 Pages: 779-782
  • DOI: 10.1016/j.apsusc.2012.10.125
  • Peer Reviewed
• [Journal Article] Photocatalytic nano-optical trapping using TiO2 nanosphere pairs mediated with Mie scattered near-field (2013)
  • Author(s): T. Honda, M. Terakawa, M. Obara
  • Journal Title: Applied Physics B Volume: 111 Pages: 117-126
  • DOI: 10.1007/s00340-012-5314-0
  • Peer Reviewed
• [Journal Article] Laser annealing of bimetal thin films : A route of fabrication of composite nanostructures (2012)
  • Author(s): N.N. Nedyalkov, R. Nikov, A.Og. Dikovska, P.A. Atanasov, G. Obara, and M. Obara
  • Journal Title: Applied Surface Sciences Volume: 258 Pages: 9162- 9166
  • DOI: 10.1016/j.apsusc.2011.12.023
  • Peer Reviewed
• [Journal Article] Enhanced localized near field and scattered far field for surface nanophotonics Applications (2012)
  • Author(s): M. Terakawa, S. Takeda, Y. Tanaka, G. Obara, T. Miyanishi, T. Sakai, T. Sumiyoshi, H. Sekita, M. Hasegawa, P. Viktorovitch, M. Obara
  • Journal Title: Progress in Quantum Electronics Volume: 36 Pages: 194-271
  • DOI: 10.1016/j.pquantelec.2012.03.006
  • Peer Reviewed
• [Journal Article] High intensity near-field generation for silicon nanoparticle arrays with oblique irradiation for large-area high throughput nanopatterning (2012)
  • Author(s): T. Miyanishi, M. Terakawa, M. Obara
  • Journal Title: Applied Physics B Volume: 107 Pages: 323-332
  • DOI: 10.1007/s00340-012-4995-8
  • Peer Reviewed
• [Journal Article] Plasmonic and Mie scattering control of far-field interference for regular ripple formation on various material substrates (2011)
  • Author(s): G. Obara, N. Maeda, T. Miyanishi, M. Terakawa, N. N. Nedyalkov, M. Obara
  • Journal Title: Optics Express Volume: 19 Pages: 19093-19103
  • DOI: 10.1364/OE.19.019093
  • Peer Reviewed
• [Journal Article] (2011)
  • Author(s): G. Obara, Y. Tanaka, N. N. Nedyalkov, M. Terakawa, M. Obara
  • Journal Title: Applied Physics Letters Volume: 99 Pages: 061106/1-3
  • DOI: 10.1063/1.3624925
  • Peer Reviewed
• [Presentation] Spot size dependence of LIPSS formation threshold using femtosecond laser (2014)
  • Author(s): 発表者, 清水九史
  • Organizer: SPIE Photonics West 2014
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2014-02-04
• [Presentation] Growth evolution of high spatial frequency LIPSS on SiC crystal surfaces (2014)
  • Author(s): 発表者, 小原豪
  • Organizer: SPIE Photonics West 2014
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2014-02-03
• [Presentation] レーザー誘起表面微細周期構造生成閾値のスポットサイズ依存性 (2014)
  • Author(s): 発表者, 清水九史
  • Organizer: レーザー学会学術講演会第34回年次大会
  • Place of Presentation: 北九州国際会議場, 北九州市
  • Year and Date: 2014-01-22
• [Presentation] Plasmonic scattering of near-field and far-field by femtosecond laser irradiation (2013)
  • Author(s): 発表者, 江並平
  • Organizer: 12th International Conference on Laser Ablation (COLA)
  • Place of Presentation: Ischia, Italy
  • Year and Date: 2013-10-07
• [Presentation] Control of localized near field and long-range plasmon polaritons for nanophotonics (2013)
  • Author(s): 発 表者, 寺川光洋
  • Organizer: Fundamentals of Laser Assisted Micro- & Nanotechnologies 2013 (FLAMN-13)
  • Place of Presentation: St. Petersburg, Russia
  • Year and Date: 2013-06-25
  • Invited
• [Presentation] Periodic surface nanopatterning controlled with preformed scattering structures excited by femtosecond laser irradiation (2013)
  • Author(s): 発表者, 小原豪
  • Organizer: SPIE Photonics West 2013
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2013-02-04
• [Presentation] Direct observation of early stages of surface ripples formation on LiNbO3 substrate (2013)
  • Author(s): 発表者, 清水久史
  • Organizer: SPIE Photonics West 2013
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2013-02-03
• [Presentation] Nanotemplateassisted fabrication of nanoneedle/ nanoprotrusion array and nano-periodic surface ripple (2012)
  • Author(s): 発表者, 寺川光洋
  • Organizer: 31st International Congress on Applications of Lasers & Electro-Optics 2012 (ICALEO 2012)
  • Place of Presentation: Anaheim, CA, USA
  • Year and Date: 2012-09-25
  • Invited
• [Presentation] Control of coherent long-range plasmon polaritons excited by a femtosecond laser for nano periodic surface patterning (2012)
  • Author(s): 発表者, 小原豪
  • Organizer: International Conference on Nanoscience + Technology (ICN+T 2012)
  • Place of Presentation: Paris, France
  • Year and Date: 2012-07-25
• [Presentation] Localized near field and scattered far field for surface photonics (2012)
  • Author(s): 発表者, 寺川光洋
  • Organizer: 14th International Conference on Transparent Optical Networks (ICTON'12)
  • Place of Presentation: Coventry, UK
  • Year and Date: 2012-07-03
  • Invited
• [Presentation] Nonlinear optical effect of nano periodic surface patterning using coherent long-range surface plasmon polaritons excited by femtosecond laser (2012)
  • Author(s): 発表者, 小原豪
  • Organizer: The 8th Asia Pacific Laser Symposium (APLS 2012)
  • Place of Presentation: 黄山, 中国
  • Year and Date: 2012-05-29
• [Presentation] Enhanced near field properties of gold nanoparticle pairs for size selective trap (2012)
  • Author(s): 発表者, 平野広大
  • Organizer: SPIE Photonics West 2012
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2012-01-26
• [Presentation] High aspect ratio of near-field nano-lens for deep nano-crater patterning (2012)
  • Author(s): 発表者, 藤村一郎
  • Organizer: SPIE Photonics West 2012
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2012-01-24
• [Presentation] Direct observation of surface plasmon far field for regular surface ripple formation by femtosecond laser irradiation of silicon wafer (2012)
  • Author(s): 発表者, 前田直輝
  • Organizer: SPIE Photonics West 2012
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2012-01-24
• [Presentation] Plasmonic control of far-field interference for regular ripple formation on various material substrates irradiated by femtosecond laser (2012)
  • Author(s): 発表者, 小原豪
  • Organizer: SPIE Photonics West 2012
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2012-01-24
• [Presentation] Templateassisted metal nanoneedle/nanoprotrusion array fabrication at a sub-diffractionlimited scale (2012)
  • Author(s): 発表者, 田中悠人
  • Organizer: SPIE Photonics West 2012
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2012-01-23
• [Presentation] Plasmonic and nanoplasmonic resonance scattered nearfield nanoprocessing (2011)
  • Author(s): 発表者, 田中悠人
  • Organizer: 11th International Conference on Laser Ablation (COLA2011)
  • Place of Presentation: Playa Del Carmen, Mexico
  • Year and Date: 2011-11-17
• [Presentation] Uniform nanohole patterning by high intensity near field ablation with nanoparticle arrays obliquely irradiated with femtosecond laser (2011)
  • Author(s): 発表者, 宮西智也
  • Organizer: 11th International Conference on Laser Ablation (COLA2011)
  • Place of Presentation: Playa Del Carmen, Mexico
  • Year and Date: 2011-11-17
• [Presentation] 1D and 2D arrays formation on the silicon surface by controlling coherent surface plasmon polaritons far-field excited by a femtosecond laser (2011)
  • Author(s): 発表者, 小原豪
  • Organizer: 11th International Conference on Laser Ablation (COLA2011)
  • Place of Presentation: Playa Del Carmen, Mexico
  • Year and Date: 2011-11-17
• [Presentation] Far-field and near-field surface ablation patterning with coherent plasmon polaritons excited by a femtosecond laser (2011)
  • Author(s): 発表者, 小原實
  • Organizer: 11th International Conference on Laser Ablation (COLA2011)
  • Place of Presentation: Playa Del Carmen, Mexico
  • Year and Date: 2011-11-15
  • Invited
• [Presentation] Scattered near-field nanopatterning (2011)
  • Author(s): 発表者, 田中悠人
  • Organizer: European Materials Research Society 2011 Spring Meeting (E-MRS)
  • Place of Presentation: Nice, France
  • Year and Date: 2011-05-12
• [Presentation] Periodic ripple formation on the silicon surface by controlling surface plasmon polariton excited by a femtosecond laser (2011)
  • Author(s): 発表者, 小原豪
  • Organizer: European Materials Research Society 2011 Spring Meeting (E-MRS)
  • Place of Presentation: Nice, France
  • Year and Date: 2011-05-12
• [Book] Ultrafast Laser Processing: From Micro- to Nano-scale, Chapter 7: Nanoablation using nanosphere and nanotip (2012)
  • Author(s): M. Terakawa, M. Obara
  • Total Pages: 27
  • Publisher: Pan Stanford Publishing Pte Ltd