2013 Fiscal Year Final Research Report
30 GHz MEMS varibale capacitor utilizing pico-liter droplet
| Project/Area Number |
23360165
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Ritsumeikan University |
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Principal Investigator |
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Keywords | RF-MEMS / 可変キャパシタ / 液滴搬送 / EWOD / フィルタ / 表面張力 / 空間二重層 / BEF |
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| Research Abstract |
The research on a novel principle utilizing the change of 80 in the permittivity in a capacitor with pure water is objective in this research. During the research, 0.1 nL water droplet could be transported in a 10 um gap. By using this varibale capacitor, a band elimination filter (BEF) for the operation of 1-6 GHz was fabricated. Note that it was indicated that water droplet in a 10 um gap could be transported, variable capacitor with water could be operated in 10 GHz, and the result could be adopted to a real filter by the success in the varibale BEF.
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