2013 Fiscal Year Final Research Report
Development of novel attosecond oxide multilayer mirrors at soft X-ray wavelengths fabricated by atomic layer epitaxy
| Project/Area Number |
23560041
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Applied optics/Quantum optical engineering
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| Research Institution | Kitasato University (2012-2013)
Osaka City University (2011) |
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Principal Investigator |
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| Project Period (FY) |
2011 – 2013
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| Keywords | 軟X線ミラー / 水の窓 / アト秒 |
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| Research Abstract |
A new approach to the fabrication of attosecond soft X ray multilayer mirrors on an atomic scale at soft X ray wavelengths is proposed to overcome serious problems regarding scattering loss at the rough surface and interface of the multilayer.
In this research project, novel approaches utilizing atomic layer epitaxy to the fabrication of ZnO/TiO2 oxide superlattice multilayer film mirror on a sapphire substrate for soft X ray wavelengths was studied. We demonstrated high reflectance and that phase could control soft X ray frequency precisely by a multiplex period in a window soft X ray domain of the so-called "water window" that ZnO/TiO2 oxide superstructure provided large frequency band.
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