2013 Fiscal Year Final Research Report
Exploration of metallic glass films for MEMS application
| Project/Area Number |
23560095
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | University of Hyogo |
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Principal Investigator |
INOUE Shozo 兵庫県立大学, 工学(系)研究科(研究院), 教授 (50193587)
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| Project Period (FY) |
2011 – 2013
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| Keywords | 金属ガラス / 薄膜 / スパッタリング / コンビナトリアル |
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| Research Abstract |
In order to develop Zr-Al-TM (TM: transition metal) metallic glass films for MEMS applications, promising film compositions were exploered by combinatorial sputtering method. In the case of Zr-Ni-Al alloy system, the most promising composition was found to exist at around Zr:Ni:Al=40:30:30. For industrialization of these materials in future, the relationship between mechanical properties of metallic glass films deposited directly from an alloy target and deposition conditions were also investigated. We have also succeeded to fabricate 3-dimensional micro-structure using its glass transition behavior.
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Research Products
(4 results)
