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2013 Fiscal Year Final Research Report

Development of a micro vibration energy harvesting device using silicon dioxide electret film including alkali ions

Research Project

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Project/Area Number 23560287
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionShizuoka University

Principal Investigator

HASHIGUCHI Gen  静岡大学, 電子工学研究所, 教授 (70314903)

Project Period (FY) 2011 – 2013
Keywordsマイクロ・ナノデバイス / マイクロマシン / 環境技術 / 省エネルギー
Research Abstract

This research focuses on a newly developed electret film that is made of silicon dioxide including potassium ions. We conducted experiments that aim control of charging property, and found that (1) the charging voltage is controllable, (2) the charging end detection is possible, (3) the charging voltage is measureable using electrostatic actuators, and (4) the maximum charging voltage is over 400V. We also fabricated a vibration energy harvesting device using the electret method and demonstrated LED illumination by 0.85 micro watts.
In addition, we examined accelerated aging tests of the electret film and evaluated -1dB voltage decay time; resulting in the charging voltage will be maintained over 30000 year at room temperature.

  • Research Products

    (12 results)

All 2014 2013 2012 2011

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (8 results) Patent(Industrial Property Rights) (3 results) (of which Overseas: 3 results)

  • [Journal Article] SiO2 Electret Generated by Potassium Ions on a Comb-Drive Actuator2011

    • Author(s)
      T.Sugiyama, M.Aoyama, Y.Shibata, M.Suzuki, T.Konno, M.Ataka, H.Fujita, G.Hashiguchi
    • Journal Title

      Appl. Phys.Express

      Volume: vol.4 Pages: 114103

    • Peer Reviewed
  • [Presentation] ELECTRET-BASED LOW POWER RESONATOR FOR ROBUST PRESSURE SENSOR2014

    • Author(s)
      H. Mitsuya, H. Ashizawa, T. Sugiyama, H. Fujita, G.Hashiguchi
    • Organizer
      27th IEEE International Conference on Micro Electro Mechanical Systems(IEEE MEMS 2014 Conference)
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      20140126-30
  • [Presentation] VERY LOW POWER CONSUMPTION MEMS SCANNER WITH ALKALI ELECTRET COMB DRIVE2014

    • Author(s)
      T. Sugiyama, M. Aoyama, K.Kawai, G.Hashiguchi
    • Organizer
      27th IEEE International Conference on Micro Electro Mechanical Systems(IEEE MEMS 2014 Conference)
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      20140126-30
  • [Presentation] ELECTROSTATIC MICRO TRANSFORMER USING POTASSIUM ION ELECTRET FORMING ON A COMB-DRIVE ACTUATOR2013

    • Author(s)
      H.Hayashi, M. Suzuki, T.Sugiyama, G.Hashiguchi
    • Organizer
      The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2013)
    • Place of Presentation
      Barcelona. Spain
    • Year and Date
      20130616-20
  • [Presentation] ELECTRO STATIC MICRO POWER GENERATOR USING POTASSIUM ION ELECTRET FORMING ON A COMB-DRIVE ACTUATOR2012

    • Author(s)
      M. Suzuki, H. Hayashi, A. Mori, T. Sugiyama, and G. Hashiguchi
    • Organizer
      The 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
    • Place of Presentation
      Atlanta, Georgia, USA
    • Year and Date
      20121202-05
  • [Presentation] Molecular Tweezers with Optical Fiber Function2012

    • Author(s)
      Kentaro Yoshii, Gen Hashiguchi, Momoko Kememura, and Hiroyuki Fujita
    • Organizer
      OPTICAL MEMS & NANOPHOTONICS CONFERENCE, Banff
    • Place of Presentation
      Alberta, Canada
    • Year and Date
      20120806-09
  • [Presentation] Characterization of an electret comb-drive actuator as an energy harvesting device2012

    • Author(s)
      Kentaro Yoshii, Tatsuhiko Sugiyama, Masato Suzuki, Hiroki Hayashi, Takashi Konno, Yasushi Shibata, Mitsuru Aoyama, and Gen Hashiguchi
    • Organizer
      2012 Joint International Conference on Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Santa Clara, California, USA
    • Year and Date
      20120618-20
  • [Presentation] EVALUATION OF THE RESONANCE FREQUENCY SHIFT OF VB-FET CAUSED BY JOULE HEATING AT THE CHANNEL2012

    • Author(s)
      Shinji Ueki, Yuki Nishimori, Hiroshi Imamoto, Masakazu Sugiyama, and Gen Hashiguchi
    • Organizer
      2012 Joint International Conference on Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Santa Clara, California, USA
    • Year and Date
      20120618-20
  • [Presentation] A NEW EXPERIMENTAL APPROACH TO EVALUATE PLASMA-INDUCED DAMAGE IN MICROCANTILEVER2012

    • Author(s)
      Yuki Nishimori, Shinji Ueki, Masakazu Sugiyama, Seiji Samukawa, and Gen Hashiguchi
    • Organizer
      2012 Joint International Conference on Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Santa Clara, California, USA
    • Year and Date
      20120618-20
  • [Patent(Industrial Property Rights)] 静電アクチュエータ及び電位差検出装置2014

    • Inventor(s)
      橋口 原、杉山達彦
    • Industrial Property Rights Holder
      国立大学法人静岡大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      特願2014-88379
    • Filing Date
      2014-04-22
    • Overseas
  • [Patent(Industrial Property Rights)] アクチュエータ、シャッタ装置、流体制御装置、スイッチおよび2次元走 査型センサ装置2013

    • Inventor(s)
      橋口 原・鈴木雅人・森 昭登・ 杉山達彦・今本浩史・大場正利・三屋 裕幸・芦澤久幸・石橋和徳
    • Industrial Property Rights Holder
      国立大学法人静岡大学・アオイ電子株式会社・オムロン株式会社・株式会社鷺宮製作所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      特願2013-165166
    • Filing Date
      2013-08-08
    • Overseas
  • [Patent(Industrial Property Rights)] 静電型変換装置及びDC-DCコンバーター2012

    • Inventor(s)
      鈴木雅人、林宏樹、橋口原、杉山達彦
    • Industrial Property Rights Holder
      アオイ電子株式会社、静岡大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      特許出願2012-192113
    • Filing Date
      2012-08-31
    • Overseas

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Published: 2015-07-16  

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