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2013 Fiscal Year Final Research Report

Fundamental study on optimization of nanocarbon materials fabrication technique using an atmospheric-pressure plasma-assisted chemical vapor deposition

Research Project

  • PDF
Project/Area Number 23560325
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Power engineering/Power conversion/Electric machinery
Research InstitutionChiba Institute of Technology

Principal Investigator

ODA Akinori  千葉工業大学, 工学部, 教授 (70335090)

Project Period (FY) 2011 – 2013
Keywordsナノカーボン材料 / プラズマCVD / 大気圧プラズマ / シミュレーション
Research Abstract

In this research project, numerical simulation of non-thermal atmospheric-pressure hydrocarbon plasmas has been conducted using a one-dimensional fluid model, in order to examine whether volumetric and radially-uniform atmospheric-pressure plasmas can be obtained. Usually, hydrocarbon plasmas at low-pressure can be utilized for the fabrication of nanocarbon materials such as diamond-like carbon, diamond, graphene, carbon nanotube, etc. As a result, it is clarified that the volumetric and radially-uniform plasmas at atmospheric-pressure hydrocarbon gas, which are suitable for novel technique of plasma CVD, can not be produced, since electron multiplication, which is important factor for plasma generation, tends to increase rapidly under atmospheric-pressure hydrocarbon condition. Therefore, we need to further investigation on this project, in order to overcome this problem.

  • Research Products

    (5 results)

All 2014 2013 2012 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (1 results) Book (1 results) Remarks (1 results)

  • [Journal Article] ダイヤモンドライクカーボン成膜用低圧CH_4プラズマにおける基板への入射炭素フラックスに関する数値解析2014

    • Author(s)
      小田昭紀, 上坂裕之
    • Journal Title

      電気学会論文誌A(基礎・材料・共通部門誌)

      Volume: Vol.134、No.1 Pages: 53-59

    • DOI

      10.1541/ieejfms.134.53

    • Peer Reviewed
  • [Journal Article] Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Adsorption Spectroscopy in Multiple Internal Reflection Geometry2013

    • Author(s)
      M. Shinohara, Y. Takami, S. Takabayashi, A. Oda, Y. Matsuda and H. Fujiyama
    • Journal Title

      IEEE. Trans. Plasma. Sci

      Volume: Vol.41 Pages: 1878-1883

    • DOI

      10.1109/TPS.2013.2263850

    • Peer Reviewed
  • [Presentation] Numerical Simulation on Fundamental Properties in Low-Pressure Radio- Frequency CH_4 Plasmas for Diamond-Like Carbon Films2012

    • Author(s)
      A. Oda and H. Kousaka
    • Organizer
      XXI Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG)
    • Place of Presentation
      Viana do Castelo, Portugal(P2.8.8, 2 pages)
    • Year and Date
      20120000
  • [Book] 現代電気電子材料2013

    • Author(s)
      山本秀和, 小田昭紀
    • Total Pages
      189
    • Publisher
      コロナ社
  • [Remarks]

    • URL

      http://scdatabase.cc.it-chiba.ac.jp/cithp/KgApp?kyoinId=ymdogyyyggy

URL: 

Published: 2015-07-16  

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