2013 Fiscal Year Final Research Report
Preparation of CuInS2 films by sputtering Cu and In in Ar-diluted H2S reactive gas with the facing target system
Project/Area Number |
23560361
|
Research Category |
Grant-in-Aid for Scientific Research (C)
|
Allocation Type | Multi-year Fund |
Section | 一般 |
Research Field |
Electronic materials/Electric materials
|
Research Institution | Niigata University |
Principal Investigator |
TSUBOI Nozomu 新潟大学, 自然科学系, 教授 (70217371)
|
Project Period (FY) |
2011 – 2013
|
Keywords | 薄膜太陽電池 / カルコパイライト / スパッタ法 / 銅インジウム硫化物 |
Research Abstract |
CuInS2 films with various [Cu]/[In] ratios were deposited by sputtering alternatively Cu- and In-facing-targets under Ar-diluted H2S atmosphere. Composition of the films corresponded to the (CuxS)-(CuInS2) system line. Stoichiometric CuInS2 films exhibited the absorption-edge corresponding to the energy-gap of CuInS2. Multilayer structures such as ZnO:Al/ZnO/ZnS/CuInS2/Mo/glass were prepared for the solar-cell application.
|
Research Products
(18 results)