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2013 Fiscal Year Final Research Report

In-situ Evaluation of Nano-structure Using an Optical-Waveguide-Spectroscopy/Quartz-Crystal-Microbalance Combination Method and Preparation of High-performance Device

Research Project

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Project/Area Number 23560362
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionNiigata University

Principal Investigator

SHINBO Kazunari  新潟大学, 自然科学系, 教授 (80272855)

Co-Investigator(Kenkyū-buntansha) BABA Akira  新潟大学, 超域学術院, 准教授 (80452077)
Co-Investigator(Renkei-kenkyūsha) KANEKO Futao  新潟大学, 自然科学系, 教授 (20016695)
KATO Keizo  新潟大学, 自然科学系, 教授 (00194811)
Project Period (FY) 2011 – 2013
Keywords水晶振動子 / 光導波路分光 / 表面プラズモン / フタロシアニン / ペンタセン
Research Abstract

In this study, a quartz-crystal-microbalance (QCM) and optical-waveguide-spectroscopy hybrid sensor was prepared and evaluation of functional organic thin film during deposition process was conducted. A measurement system was developed and a relationship between optical property and thickness of vacuum evaporated organic thin film was investigated. Thin films of lead phthalocyanine (PbPc), one of promising solar cell material, were mainly studied. The aggregate formation and molecular orientation and their substrate temperature and substrate surface treatment dependences were investigated in a thickness range from sub-monolayer to several tens of nanometers. Furthermore, QCM and surface-plasmon-resonance hybrid sensor was prepared and evaluations of functional organic thin films were conducted during deposition processes in air and water.

  • Research Products

    (28 results)

All 2014 2013 2012 2011

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (22 results) (of which Invited: 2 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 2 results)

  • [Journal Article] Fabrication of a Quartz-Crystal-Microbalance/Optical-Wav eguide Hybrid Sensor and In situ Evaluation of Vacuum-Evaporated Lead Phthalocyanine Thin Film2013

    • Author(s)
      Kazunari Shinbo, Akihiro Uno, Ryo Hirakawa, Akira Baba, Yasuo Ohdaira, Keizo Kato, and Futao Kaneko
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Pages: 05DC20 1-5

    • DOI

      10.7567/JJAP.52.05DC20

    • Peer Reviewed
  • [Journal Article] Fabrication of a Quartz-Crystal- Microbalance/Surface- Plasmon-Resonance Hybrid Sensor and Its Use for Detection of Polymer Thin-Film Deposition and Evaluation of Moisture Sorption Phenomena2012

    • Author(s)
      Kazunari Shinbo, Hiroshi Ishikawa, Akira Baba, Yasuo Ohdaira, Keizo Kato, and Futao Kaneko
    • Journal Title

      Appl. Phys. Express

      Volume: 5 Pages: 036603 1-3

    • DOI

      10.1143/APEX.5.036603

    • Peer Reviewed
  • [Journal Article] Humidity Detection by Using a Hybrid Sensor Employing Optical Waveguide Spectroscopy and Quartz Crystal Microbalance2011

    • Author(s)
      Kazunari SHINBO, Makoto IWASAKI, Yasuo OHDAIRA, Akira BABA, Keizo KATO, Futao KANEKO
    • Journal Title

      IEICE TRANSACTIONS on Electronics

      Volume: Vol.E94-C No.12 Pages: 1851-1854

    • DOI

      10.1587/transele.E94.C.1851

    • Peer Reviewed
  • [Journal Article] Nano-Structured Organic Devises and Biosensors Utilizing Evanescent Waves and Surface Plasmon Resonance2011

    • Author(s)
      Futao KANEKO, Akira BABA, Kazunari SHINBO, Keizo KATO
    • Journal Title

      IEICE TRANSACTIONS on Electronics

      Volume: Vol.E94-C No.12 Pages: 1824-1831

    • DOI

      10.1587/transele.E94.C.1824

    • Peer Reviewed
  • [Presentation] Evaluation of PAH/PSS layer-by-layer deposited film using a quartz-crystal-microbalance and surface-plasmon-resonance hybrid sensor2014

    • Author(s)
      Keisuke Kawachi, Kazunari Shinbo, Yasuo Ohdaira, Akira Baba, Keizo Kato, Futao Kaneko
    • Organizer
      The 8th International Symposium on Organic Molecular Electronics
    • Place of Presentation
      Tokyo(P-15)
    • Year and Date
      20140515-16
  • [Presentation] 表面プラズモン・水晶振動子複合センサを用いた電解質交互吸着膜の堆積評価2013

    • Author(s)
      河内啓介, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Organizer
      第44回電気電子絶縁材料システムシンポジウム
    • Place of Presentation
      豊橋(MVP-13)
    • Year and Date
      20131125-27
  • [Presentation] 水晶振動子・光導波路分光複合センサを用いた鉛フタロシアニン薄膜の光学特性評価2013

    • Author(s)
      平川諒, 鵜野成博, 大平泰生, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京都(17p-P3-4)
    • Year and Date
      20130917-20
  • [Presentation] 光導波路および水晶振動子微量天秤を用いた有機薄膜の堆積評価2013

    • Author(s)
      新保一成, 平川諒, 澁市真吾, 石郷岡誠, 河内啓介, 馬場暁, 加藤景三, 金子双男
    • Organizer
      有機エレクトロニクス研究討論会
    • Place of Presentation
      佐渡
    • Year and Date
      20130704-05
  • [Presentation] 光導波路分光・水晶振動子複合センサによる鉛フタロシアニン蒸着膜の堆積評価2013

    • Author(s)
      鵜野成博, 平川諒, 大平泰生, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Place of Presentation
      岐阜(C-13-10)
    • Year and Date
      20130319-22
  • [Presentation] Organic Hybrid Sensors Utilizing Surface Plasmon Resonance2012

    • Author(s)
      Keizo Kato, Akira Baba, Kazunari Shinbo and Futao Kaneko
    • Organizer
      The 12th International Discussion & Conference on Nano Interface Controlled Electronic Devices (IDC-NICE 2012)
    • Place of Presentation
      Gyeongju, Korea(IB3, p.52)
    • Year and Date
      20121024-27
  • [Presentation] In-situ Evaluation of Lead Phthalocyanine Thin Film Deposition Using a Hybrid Sensor of Quartz Crystal Microbalance and Optical Waveguide Spectroscopy2012

    • Author(s)
      A. Uno, R. Hirakawa, Y. Ohdaira, A. Baba, K. Shinbo, K. Kato and F. Kaneko
    • Organizer
      The 2012 International Conference on Flexible and Printed Electronics (ICFPE)
    • Place of Presentation
      Tokyo(S9-P3)
    • Year and Date
      20120906-08
  • [Presentation] 水晶振動子, 光導波路分光複合センサを用いた鉛フタロシアニン薄膜の堆積評価2012

    • Author(s)
      平川諒, 鵜野成博, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Organizer
      誘電, 絶縁材料研究会
    • Place of Presentation
      軽井沢(DEI-12-082)
    • Year and Date
      20120719-20
  • [Presentation] Evaluation of Thin Film Deposition and Gas Detection Using Surface Plasmon Resonance and Optical Waveguide Sensors2012

    • Author(s)
      Kazunari Shinbo, Yasuo Ohdaira, Akira Baba, Keizo Kato, Futao Kaneko
    • Organizer
      The 7th International Symposium on Organic Molecular Electronics
    • Place of Presentation
      Tokyo(I-2, p.15)
    • Year and Date
      20120606-07
    • Invited
  • [Presentation] 水晶振動子・光導波路分光複合センサによる鉛フタロシアニン薄膜推積のその場評価2012

    • Author(s)
      鵜野成博, 平川諒, 大平泰生, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京(15p-GP8-6)
    • Year and Date
      20120315-18
  • [Presentation] 電気泳動法によるAlcian Blue薄膜の堆積と光導波路分光法・水晶振動子微量天秤法によるその場評価2012

    • Author(s)
      村上恭介, 馬場暁,新保一成,加藤景三,金子双男
    • Organizer
      平成24年度(第22回)電気学会東京支部新潟支所研究発表会
    • Place of Presentation
      長岡(II-03)
    • Year and Date
      2012-11-10
  • [Presentation] 水晶振動子・光導波路分光複合センサによる鉛フタロシアニン蒸着膜のその場評価2012

    • Author(s)
      鵜野成博, 平川諒, 大平泰生, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Organizer
      平成24年度電子情報通信学会信越支部大会
    • Place of Presentation
      新潟(9A-3, p.140)
    • Year and Date
      2012-10-13
  • [Presentation] 表面プラズモン励起を利用した高効率・高性能有機デバイス2012

    • Author(s)
      加藤景三, 馬場暁, 新保一成, 金子双男
    • Organizer
      有機・無機エレクトロニクスシンポジウム
    • Place of Presentation
      富山(I-1)
    • Year and Date
      2012-06-29
  • [Presentation] 水晶基板上へのグレーティング構造転写と水晶振動子・表面プラズモン複合センシング2011

    • Author(s)
      手嶋勇貴, 新保一成, 黒木一孝, 大平泰生, 馬場暁, 加藤景三, 金子双男
    • Organizer
      平成23年度応用物理学会北陸・信越支部学術講演会
    • Place of Presentation
      金沢(19a-A-12)
    • Year and Date
      20111118-19
  • [Presentation] Organic Devices and Sensors Utilizing Surface Plasmon Excitations2011

    • Author(s)
      Keizo Kato, Akira Baba, Kazunari Shinbo and Futao Kaneko
    • Organizer
      11th Int. Discussion Conf. on Nano Interface Controlled Electronic Devices
    • Place of Presentation
      Dazaifu, Japan(21p-2, p.54)
    • Year and Date
      20111019-22
  • [Presentation] Evaluation of Phthalocyanine Film Deposition using Hybrid Sensor of Quartz Crystal Microbalance and Optical Waveguide Spectroscopy2011

    • Author(s)
      A. Uno, K. Shinbo, H. Ishikawa, Y. Ohdaira, A. Baba, K. Kato, F. Kaneko
    • Organizer
      ISEIM 2011
    • Place of Presentation
      Kyoto, Japan(P6)
    • Year and Date
      20110906-11
  • [Presentation] 水晶振動子・光導波路分光複合センサによる鉛フタロシアニン真空蒸着薄膜のその場推積評価2011

    • Author(s)
      鵜野成博, 大平泰生, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形(1a-ZB-1)
    • Year and Date
      20110829-0901
  • [Presentation] Vapor Detection and Evaluation of Thin Film Deposition Using a Hybrid Sensor of Quartz Crystal Microbalance and Optical Waveguide Spectroscopy2011

    • Author(s)
      K.Shinbo, H.Ishikawa, M.Iwasaki, A.Uno, Y.Ohdaira, A.Baba, K.Kato and F.Kaneko
    • Organizer
      Collaborative Conference on 3D & Materials Research
    • Place of Presentation
      Jeju, South Korea(p.91)
    • Year and Date
      20110627-0701
    • Invited
  • [Presentation] 超音波霧化堆積法によるフタロシアニン薄膜の作製と水晶振動子微量天秤・光導波路分光法による複合その場評価2011

    • Author(s)
      黒澤英二, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Organizer
      平成23年度(第21回)電気学会東京支部新潟支所研究発表会
    • Place of Presentation
      長岡(I-14, p.16)
    • Year and Date
      2011-11-23
  • [Presentation] 水晶振動子・光導波路分光法を用いた色素交互吸着膜形成過程の複合測定2011

    • Author(s)
      真島康, 大平泰生, 清水英彦, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Organizer
      平成23年度電子情報通信学会信越支部大会
    • Place of Presentation
      柏崎(6A-4)
    • Year and Date
      2011-10-08
  • [Presentation] 導波路型表面プラズモン共鳴及び水晶振動子複合センサを用いた薄膜堆積評価2011

    • Author(s)
      石川寛, 新保一成, 大平泰生, 馬場暁, 加藤景三, 金子双男
    • Organizer
      平成23年度電子情報通信学会信越支部大会
    • Place of Presentation
      柏崎(6B-2)
    • Year and Date
      2011-10-08
  • [Presentation] 光導波路分光・水晶振動子天秤複合法を用いた蒸気センシング2011

    • Author(s)
      石川寛, 大平泰生, 馬場暁, 新保一成, 加藤景三, 金子双男
    • Organizer
      誘電・絶縁材料研究会
    • Place of Presentation
      新潟(DEI-11-62)
    • Year and Date
      2011-07-08
  • [Patent(Industrial Property Rights)] 物質吸着検知方法及び物質吸着検知センサ2013

    • Inventor(s)
      宮寺信生, 相田和也, 鶴貝嘉則, 新保一成, 大平泰生, 馬場暁, 加藤景三, 金子双男, 小林一稔
    • Industrial Property Rights Holder
      日立化成株式会社, 国立大学法人 新潟大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      5224164
    • Acquisition Date
      2013-03-22
    • Overseas
  • [Patent(Industrial Property Rights)] センサ基板およびこれを用いた複合センサ2012

    • Inventor(s)
      宮寺信生, 山口正利, 神林裕一, 大朏俊弥, 新保一成, 大平泰生, 馬場 暁, 加藤景三, 金子双男
    • Industrial Property Rights Holder
      日立化成株式会社, 国立大学法人 新潟大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      5030059
    • Acquisition Date
      2012-07-06
    • Overseas

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Published: 2015-07-16  

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