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2013 Fiscal Year Final Research Report

Loss reduction of longitudinal-type leaky surface acoustic wave by reverse proton exchange and its application to high-frequency filter

Research Project

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Project/Area Number 23560365
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Yamanashi

Principal Investigator

KAKIO Shoji  山梨大学, 医学工学総合研究部, 教授 (70242617)

Project Period (FY) 2011 – 2013
Keywords弾性表面波 / LiNbO3 / 逆プロトン交換 / AlN薄膜 / 低損失フィルタ / バルク波放射
Research Abstract

Surface acoustic wave (SAW) devices with higher frequency have been strongly demanded to realize the next generation mobile communication system. The longitudinal-type leaky surface acoustic wave (LLSAW) is one of the SAW modes that is advantageous for application to high-frequency SAW devices. However, the LLSAW has huge inherent losses. In this study, it has been found theoretically and experimentally for the LLSAW propagating on LiNbO3 substrate that, the losses due to bulk wave radiation can be considerably reduced by forming a reverse proton exchange layer or by loading with a dielectric thin film with a higher velocity than the substrate.

  • Research Products

    (25 results)

All 2014 2013 2012 2011 Other

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (19 results) Remarks (1 results)

  • [Journal Article] Loss reduction of longitudinal-type leaky surface acoustic wave by loading with high-velocity thin film2014

    • Author(s)
      F. Matsukura and S. Kakio
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: vol.53, no.7S Pages: 07KD04-1-6

    • DOI

      10.7567/JJAP.53.07KD04

    • Peer Reviewed
  • [Journal Article] Longitudinal-type leaky surface acoustic wave on LiNbO3 with high-velocity thin film2013

    • Author(s)
      F. Matsukura, M. Uematsu, K. Hosaka, and S. Kakio
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: vol.52, no.7 Pages: 07HD02-1-4

    • DOI

      10.7567/JJAP.52.07HD02

    • Peer Reviewed
  • [Journal Article] Longitudinal-type leaky SAW on LiNbO3 with high-velocity thin film2013

    • Author(s)
      F. Matsukura, M. Uematsu, K. Hosaka, and S. Kakio
    • Journal Title

      Proc. of 2013 Joint UFFC, EFTF, and PFM Symp

      Volume: 1692-1695

    • Peer Reviewed
  • [Journal Article] Loss reduction of longitudinal-type leaky surface acoustic wave by reverse proton exchange2012

    • Author(s)
      S. Kakio and M. Abe
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: vol.51, no.7 Pages: 07GC17-1-5

    • DOI

      10.1143/JJAP.51.07GC17

    • Peer Reviewed
  • [Journal Article] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange2012

    • Author(s)
      S. Kakio and M. Abe
    • Journal Title

      Proc. of 2012 IEEE International Ultrasonics Symp

      Pages: 1802-1805

    • Peer Reviewed
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化2014

    • Author(s)
      松倉史弥, 垣尾省司
    • Organizer
      圧電材料・デバイスシンポジウム2014
    • Place of Presentation
      仙台, 東北大(予稿集, F-3, pp.79-84)
    • Year and Date
      2014-01-30
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by loading with high-velocity thin film2013

    • Author(s)
      F. Matsukura and S. Kakio
    • Organizer
      The 34th Symposium on ULTRASONIC ELECTRONICS
    • Place of Presentation
      Doshisha Univ., Kyoto(1P-3-8, pp.145-146)
    • Year and Date
      2013-11-20
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化2013

    • Author(s)
      松倉史弥, 垣尾省司
    • Organizer
      日本学術振興会弾性波技術第150委員会第133回研究会
    • Place of Presentation
      仙台, 仙台ガーデンパレス(資料, pp.19-24)
    • Year and Date
      2013-10-03
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化2013

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      日本音響学会2013年秋季研究発表会
    • Place of Presentation
      豊橋, 豊橋技術科学大(講演論文集, 1-4-19, pp.1171-1174)
    • Year and Date
      2013-09-25
  • [Presentation] 高音速薄膜装荷による縦型漏洩弾性表面波の低損失化2013

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京田辺, 同志社大(講演予稿集, 17p-A2-1, p.01-120)
    • Year and Date
      2013-09-17
  • [Presentation] 高音速薄膜装荷LiNbO3基板上の縦型漏洩弾性表面波2013

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      第42回EMシンポジウム
    • Place of Presentation
      東京, 東京理科大学(pp.43-46)
    • Year and Date
      2013-05-17
  • [Presentation] 高音速薄膜装荷LiNbO3基板上の縦型漏洩弾性表面波2013

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(29a-B5-5, p.01-139)
    • Year and Date
      2013-03-29
  • [Presentation] Longitudinal-type leaky SAW on LiNbO3 with high-velocity thin film2012

    • Author(s)
      F. Matsukura, M. Uematsu, K. Hosaka, and S. Kakio
    • Organizer
      The 33th Symposium on ULTRASONIC ELECTRONICS
    • Place of Presentation
      Chiba University, Chiba(2P3-5, pp.203-204)
    • Year and Date
      20121113-15
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange2012

    • Author(s)
      S. Kakio and M. Abe
    • Organizer
      2012 International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems
    • Place of Presentation
      Chiba University, Chiba(pp.131-135)
    • Year and Date
      2012-12-07
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange–Dependence of recovery of piezoelectricity on fabrication conditions–2012

    • Author(s)
      M. Abe and S. Kakio
    • Organizer
      The 33th Symposium on ULTRASONIC ELECTRONICS
    • Place of Presentation
      Chiba University, Chiba(2P3-6, pp.205-206)
    • Year and Date
      2012-11-14
  • [Presentation] 高音速薄膜装荷LiNbO3基板上の縦型漏洩弾性表面波2012

    • Author(s)
      松倉史弥, 植松真人, 保坂桂子, 垣尾省司
    • Organizer
      日本音響学会2012年秋期研究発表会
    • Place of Presentation
      長野, 信州大学(2-5-8, pp.1365-1366)
    • Year and Date
      2012-09-20
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化―圧電性回復の作製条件依存性―2012

    • Author(s)
      阿部真也, 垣尾省司
    • Organizer
      日本音響学会2012年秋期研究発表会
    • Place of Presentation
      長野, 信州大学(2-5-6, pp.1361-1362)
    • Year and Date
      2012-09-20
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2012

    • Author(s)
      垣尾省司, 阿部真也
    • Organizer
      日本学術振興会弾性波素子技術第150委員会第125回研究会
    • Place of Presentation
      東京, 弘済会館(pp.7-12)
    • Year and Date
      2012-05-14
  • [Presentation] アルミナ薄膜装荷LiNbO3基板上の縦型漏洩弾性表面波2012

    • Author(s)
      垣尾省司, 植松真人, 保坂桂子
    • Organizer
      2012年電子情報通信学会総合大会
    • Place of Presentation
      岡山大学(A-11-4, p.204)
    • Year and Date
      2012-03-20
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2012

    • Author(s)
      垣尾省司, 阿部真也
    • Organizer
      圧電材料・デバイスシンポジウム2012
    • Place of Presentation
      仙台, 東北大学(B-3, pp.23-28)
    • Year and Date
      2012-01-30
  • [Presentation] Loss reduction of longitudinal-type leaky SAW by reverse proton exchange2011

    • Author(s)
      M. Abe and S. Kakio
    • Organizer
      The 32th Symposium on ULTRASONIC ELECTRONICS
    • Place of Presentation
      Kyoto University, Kyoto(2Pb3-8, pp.227-228)
    • Year and Date
      2011-11-09
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2011

    • Author(s)
      阿部真也, 垣尾省司
    • Organizer
      電子情報通信学会超音波研究会
    • Place of Presentation
      甲府, 山梨大学(US2011-64, p.35-39)
    • Year and Date
      2011-10-31
  • [Presentation] 逆プロトン交換による縦型漏洩弾性表面波の低損失化2011

    • Author(s)
      阿部真也, 垣尾省司
    • Organizer
      日本音響学会2011年秋期研究発表会
    • Place of Presentation
      松江, 島根大学(3-2-12)
    • Year and Date
      2011-09-22
  • [Presentation] 逆プロトン交換LiNbO3基板上の縦型漏洩弾性表面波の伝搬特性2011

    • Author(s)
      垣尾省司, 阿部真也, 清水秀徳
    • Organizer
      第40回EMシンポジウム
    • Place of Presentation
      東京, 東京理科大学(pp.85-90)
    • Year and Date
      2011-05-20
  • [Remarks] ホームページ

    • URL

      http://www.ccn.yamanashi.ac.jp/~kakio/

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Published: 2015-07-16  

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