• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

2013 Fiscal Year Final Research Report

Zinc oxide transparent transistor and its application to stacked image sensor

Research Project

  • PDF
Project/Area Number 23560408
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionKochi University of Technology

Principal Investigator

FURUTA MAMORU  高知工科大学, 工学部, 教授 (20412439)

Co-Investigator(Kenkyū-buntansha) URAOKA Yukiharu  奈良先端科学技術大学院大学, 物質創成科学研究科, 教授 (20314536)
KIMURA Mutsumi  龍谷大学, 理工学部, 教授 (60368032)
Project Period (FY) 2011 – 2013
Keywords先端機能デバイス / 電子・電気材料 / 半導体物性 / 酸化物半導体 / 透明回路 / イメージセンサ
Research Abstract

The aim of this research is to achieve transparent thin-film transistor by using wide-gap oxide semiconductors. Based on the analysis of the influence of lattice defects existing in an oxide semiconductor bulk and at an interface between insulator and oxide semiconductor on electrical properties and reliability of the transistor, we investigated the defect passivation method of oxide semiconductors.
As a consequence of this research, transparent thin-film transistor, which was not influenced by visible light irradiation, could be achieved, and the stacked organic image sensor has been successively demonstrated with transparent signal readout circuits.

  • Research Products

    (22 results)

All 2014 2013 2012 2011 Other

All Journal Article (12 results) (of which Peer Reviewed: 12 results) Presentation (6 results) Book (2 results) Remarks (2 results)

  • [Journal Article] Suppression of degradation induced by negative gate bias and illumination stress in amorphous InGaZnO thin-film transistor by applying negative drain bias2014

    • Author(s)
      D. Wang, M. Furuta, 他計5名(5番)
    • Journal Title

      ACS applied Materials and Interfaces

      Volume: 6 Pages: 5713-5718

    • DOI

      10.1021/am500300g

    • Peer Reviewed
  • [Journal Article] Negative bias illumination stress induced electron trapping at back-channel interface of InGaZnO thin-film transistor2014

    • Author(s)
      M. P. Hung, M. Furuta, 他計4名(4番)
    • Journal Title

      Electrochemical and Solid-State Letters

      Volume: 3(3) Pages: Q13-Q16

    • DOI

      10.1149/2.010403ssl

    • Peer Reviewed
  • [Journal Article] Thermal analysis of amorphous oxide thin-film transistor degraded by combination of joule heating and hot carrier effect2013

    • Author(s)
      S. Urakawa, M. Furuta, Y. Uraoka, 他計11名(8番)
    • Journal Title

      Applie Physics letters

      Volume: 102 Pages: 53506-1~3

    • DOI

      10.1063/1.4790619

    • Peer Reviewed
  • [Journal Article] The deterioration phenomenon of amorphous InSnZnO transistors derivered from the process of annealing2013

    • Author(s)
      S. Tomai, M. Furuta, 他計10名(10番)
    • Journal Title

      Electrochemical and Solid-State Letters

      Volume: 2(12) Pages: P107-P109

    • DOI

      10.1149/2.003312ssl

    • Peer Reviewed
  • [Journal Article] Growth and electrical properties of AlOx grown by mist chemical vapor deposition2013

    • Author(s)
      T. Kawaharamura, M. Furuta, 計4名(4番)
    • Journal Title

      AIP Advances

      Volume: 3(3) Pages: 032135 -1~9

    • DOI

      10.1063/1.4798303

    • Peer Reviewed
  • [Journal Article] Electrical properties of thin-film transistor with an Indium-Gallium-Zinc Oxide channel and Aluminum oxide gate dielectric stack formed by solution-based atmospheric pressure deposition2012

    • Author(s)
      M. Furuta, 他計5名
    • Journal Title

      IEEE Electron Device Letters

      Volume: 33 Pages: 851-853

    • DOI

      10.1109/LED.2012.2192902

    • Peer Reviewed
  • [Journal Article] Photoleakage current of TFTs with ZnO channels formed at various oxygen partial pressure under visible light irradiation2012

    • Author(s)
      S. Shimakawa, M. Furuta, 他計8名(8番)
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Pages: 03CB04-1~4

    • DOI

      10.1143/JJAP.51.03CB04

    • Peer Reviewed
  • [Journal Article] A 128×96 Pixel, 50μm Pixel Pitch Transparent Readout Circuit using InGaZnO4 Thin Film Transistor Array with Indium-Tin-Oxide Electrodes for Organic Image Sensor2012

    • Author(s)
      T. Sakai, M. Furuta, 他計7名(7番)
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Pages: 010202-1~3

    • DOI

      10.1143/JJAP.51.010202

    • Peer Reviewed
  • [Journal Article] Extraction of Trap Densities in ZnO Thin-film Transistors and Dependence on Oxygen Partial Pressures during Sputtering of ZnO Films2011

    • Author(s)
      M. Kimura, M. Furuta,他計9名(2番)
    • Journal Title

      IEEE Trans. Electron Devices

      Volume: 58 Pages: 3018~3024

    • DOI

      10.1109/TED.2011.2158546

    • Peer Reviewed
  • [Journal Article] Trap Densities in ZnO Thin-Film Transistors with SiOx Gate Insulators by Several Deposition Conditions2011

    • Author(s)
      M. Kimura, M. Furuta, 他計9名
    • Journal Title

      Electrochemical and Solid-State Letters

      Volume: 14 Pages: H365-H367

    • DOI

      10.1149/1.3601058

    • Peer Reviewed
  • [Journal Article] ZnO Thin Film Fabricated by Plasma-Assisted Atomic Layer Deposition2011

    • Author(s)
      Y. Kawamura, Y. Uraoka, 他計5名
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50 Pages: 04DF05-1~4

    • DOI

      10.1143/JJAP.50.04DF05

    • Peer Reviewed
  • [Journal Article] High performance solution-processed InGaZnO thin-film Transistor fabricated by ozone-assisted atmospheric pressure mist deposition

    • Author(s)
      M. Furuta, 他計5名(1番)
    • Journal Title

      Journal of Display Technology (IEEE)

      Volume: (in-press)

    • DOI

      10.1109/JDT.2013.2294967

    • Peer Reviewed
  • [Presentation] Negative bias with illumination stress induced state creation in a-InGaZnO TFT2013

    • Author(s)
      M. Furuta, 計7名(1番)
    • Organizer
      International Conference of Semiconductor Technology for ULSI and TFT
    • Place of Presentation
      Grenoble, France
    • Year and Date
      20130000
  • [Presentation] High performance oxide Thin-Film Transistor fabricated using atmospheric pressure deposition method2013

    • Author(s)
      M. Furuta, 計1名(1番)
    • Organizer
      International Conference on Advanced Materials
    • Place of Presentation
      Qingdao, China
    • Year and Date
      20130000
  • [Presentation] Atmospheric pressure Processed InGaZnO Thin-film transistors2013

    • Author(s)
      M. Furuta, 計2名(1番)
    • Organizer
      IEEE International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      20130000
  • [Presentation] Solution-Based Atmospheric Pressure Deposition Method for Oxide TFTs2012

    • Author(s)
      M. Furuta, 計3名(1番)
    • Organizer
      The 19th International Display Workshops
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      20120000
  • [Presentation] Oxide Thin-Film Transistors for Flat Panel Displays and Transparent Electronics2012

    • Author(s)
      M. Furuta, 計1名(1番)
    • Organizer
      20th International Conference on Composites or Nano Engineering
    • Place of Presentation
      Beijing, China
    • Year and Date
      20120000
  • [Presentation] Color Image Sensor with Virtically-stacked Organic Photoconductive Films2011

    • Author(s)
      M. Furuta, 計7名(6番)
    • Organizer
      The 18th International Display Workshops (IDW'11)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      20110000
  • [Book] 応用物理, "ミスト化学気相成長法を用いた大気圧薄膜形成と酸化物機能デバイスのグリーンプロセス化"2014

    • Author(s)
      川原村敏幸, 古田守
    • Total Pages
      5
    • Publisher
      応用物理学会(2014年9月号掲載決定)
  • [Book] 月刊ディスプレイ(2013年10月号), "溶液プロセスによる酸化物半導体TFTの大気圧形成技術"2013

    • Author(s)
      古田守, 川原村敏幸
    • Total Pages
      17-22(総ページ数6)
    • Publisher
      テクノタイムス社
  • [Remarks] 高知工科大学 古田研究室

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/

  • [Remarks] 本研究の詳細に関する公開

    • URL

      http://www.env.kochi-tech.ac.jp/m-furuta/research01.html

URL: 

Published: 2015-07-16  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi