2013 Fiscal Year Final Research Report
Physical properties of optimization and control of nitride superconducting thin films for superconducting device applications
| Project/Area Number |
23560431
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | National Institute of Information and Communications Technology |
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Principal Investigator |
MAKISE Kazumasa 独立行政法人情報通信研究機構, 未来ICT研究所 ナノICT研究室, 研究員 (60363321)
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| Project Period (FY) |
2011 – 2013
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| Keywords | 超伝導デバイス / 超伝導薄膜 / 窒化物薄膜 |
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| Research Abstract |
In order to find the optimum condition for fabrication of high-quality NbTiN thin films, we investigated the relationship between superconducting properties and crystal structure for the NbTiN thin films deposited on various substrates under different depositing conditions.It is found that the superconducting properties of the films depend on the lattice constnt
Next,we developed NbN-based SFQ circuits consisting of high-quality epitaxial NbN/AlN/NbN trilayer grown on MgO (100) substrate. We succeeded in demonstrating correct operations of all the designed SFQ cells.
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[Journal Article]2012
Author(s)
S. Ezaki, K. Makise, B. Shinozaki, T. Odou, T. Asano, H. Terai, T. Yamashita, S. Miki, Z. Wang
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Journal Title
J. Phys. Condens. Matter
Volume: 24
Pages: 4757022-1-5
DOI
Peer Reviewed
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