2013 Fiscal Year Final Research Report
Development of the automatic R&D system for reaction processes
| Project/Area Number |
23560919
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Multi-year Fund |
|---|
| Section | 一般 |
|---|
| Research Field |
Reaction engineering/Process system
|
|---|
| Research Institution | Shizuoka University |
|---|
Principal Investigator |
|
|---|
| Project Period (FY) |
2011 – 2013
|
| Keywords | 化学気相堆積法 / CVD / 実数値遺伝的アルゴリズム / Bio-inspired algorithms / 反応機構 / モデリング / 自動化 / 微細加工 |
|---|
| Research Abstract |
In this study, we developed the automatic system to model the reaction mechanisms of CVD processes, in order to decrease the labor requirement and increase the speed of R&D in semiconductor industries. We evaluated the various optimization algorithms, which is dominant to the performance of the system, and found the real-coded genetic algorithms as the candidates for the implementation to the system. As a result, we successfully improved both the accuracy and the cost of the calculations of the system. In addition, we proposed and evaluated a mechanism for interlocking the system and a CFD simulator in order to apply the system to the commercial CVD reactor with complex physical and chemical phenomena.
|
Research Products
(9 results)
