2013 Fiscal Year Final Research Report
Establishment of a real time measurement method of carbon film deposition process and its surface modification process during plasma generated in liquid, and the clalification of these processes
| Project/Area Number |
23654203
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Plasma science
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| Research Institution | Nagasaki University |
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Principal Investigator |
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| Co-Investigator(Renkei-kenkyūsha) |
MATSUDA Yoshinobu 長崎大学, 大学院・工学研究科, 准教授 (60199817)
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| Project Period (FY) |
2011 – 2012
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| Keywords | 液中プラズマ / 反応計測 / 赤外吸収分光 / 多重内部反射 / 溶液 / 堆積物 / バイオ応用 |
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| Research Abstract |
Plasma generated in liquid is a new promising plasma source. However, the reaction measurement is difficult because plasma diagnostics have been developed for low-pressure plasma process. Thereby, we developed a new measurement system for plasma in liquid, using Infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS). We succeeded in the measurement of the plasma process: the changes in chemical states of the solution and the chemical states of deposits due to the plasma generation in the solution. We also succeeded in the measurement of the reaction of the plasma with bio-model materials. This result suggests the MIR-IRAS is suitable to diagnostics of plasma in liquid for the bio- and medical application.
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Research Products
(8 results)
