2012 Fiscal Year Final Research Report
Acceleration of Stress Migration Using Thermal Control and itsApplication in Mass Fabrication of Micro/Nano Materials
| Project/Area Number |
23656076
|
|---|
| Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Materials/Mechanics of materials
|
|---|
| Research Institution | Tohoku University |
|---|
Principal Investigator |
SAKA Masumi 東北大学, 大学院・工学研究科, 教授 (20158918)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
RI Shien 独立行政法人産業技術総合研究所, 計測フ ロンティア研究部門, 主任研究員 (70509710)
|
|---|
| Project Period (FY) |
2011 – 2012
|
| Keywords | 材料設計・プロセス・物性・評価 / ストレスマイグレーション / 原子拡散 |
|---|
| Research Abstract |
To realize the mass fabrication of various metallic micro/nano materials using stress migration (SM), the effect of thermal control including thermal cycle and atmosphere cooling was investigated systematically by carrying out a series of annealing experiments on different metallic thin films samples. The investigation on the suitable condition of thermal control for effective atomic diffusion and discharge indicates that the induced promotion of both atomic mobility and driving force can increase the absolute value of the atomic flux divergence and accelerate SM, which makes a significant contribution to mass fabrication of various metallic micro/nano materials.
|
