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2012 Fiscal Year Final Research Report

Development of High-Quality and High-Throughput Micro-HoleProcessing Using Hollow Microneedle Array

Research Project

  • PDF
Project/Area Number 23656103
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionToyohashi University of Technology

Principal Investigator

SHIBATA Takayuki  豊橋技術科学大学, 大学院・工学研究科, 教授 (10235575)

Project Period (FY) 2011 – 2012
Keywordsナノ・マイクロ加工 / マイクロ穴加工 / 熱インプリント / マイクロニードルアレイ / MEMS
Research Abstract

):A novel thermal imprinting technique has been developed to enable the high-throughput fabrication of through holes with a minimum feature of a few tens of micrometers in a wide variety of polymers with high quality and precision by using an array of out-of-plane, hollow microneedles as an imprint tool. This technique can also be applicable to the formation of through holes with almost any non-circular cross-sections (triangle, square, star-shaped holes, etc.) as well as circular ones.

  • Research Products

    (6 results)

All 2013 2012 2011 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (4 results) Remarks (1 results)

  • [Journal Article] Modified Imprinting Process Using Hollow Microneedle Array for Forming Through Holes in Polymers2011

    • Author(s)
      T. Shibata, S. Yukizono, T. Kawashima, M. Nagai, T. Kubota, M. Mita
    • Journal Title

      Microelectron. Eng

      Pages: 2121-2125

    • DOI

      DOI:10.1016/j.mee.2010.12.048

    • Peer Reviewed
  • [Presentation] マイクロニードルアレイを用いた高品位・高能率マイクロ穴加工技術の開発(第4 報)-穴加工時の振動援用効果検討-2013

    • Author(s)
      三苫祐輝,永井萌土,川島貴弘,柴田隆行,久保田俊夫,御田 護,西川忠寛
    • Organizer
      2013 年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京工業大学(東京)
    • Year and Date
      2013-03-15
  • [Presentation] マスクレス微細加工技術と細胞機能解析用MEMS プラットフォーム2012

    • Author(s)
      柴田隆行(招待講演)
    • Organizer
      第31回マイクロファブリケーションシンポジウム(理研シンポジウム)
    • Place of Presentation
      理化学研究所
    • Year and Date
      2012-11-01
  • [Presentation] マイクロニードルアレイを用いた高品位・高能率マイクロ穴加工技術の開発(第3 報)-樹脂フィルムへの貫通穴加工過程の評価-2011

    • Author(s)
      吉田隼兵,永井萌土,川島貴弘,柴田隆行,久保田俊夫,御田 護
    • Organizer
      2011 年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学(金沢市)
    • Year and Date
      2011-09-21
  • [Presentation] A Novel Thermal Imprinting Technique for Forming Through Holes in Polymers by Using Hollow Microneedle Array2011

    • Author(s)
      T. Shibata, J. Yoshida, M. Nagai, T. Kawashima, T. Kubota, M. Mita
    • Organizer
      The 37th International Conference on Micro and Nano Engineering 2011 (MNE 2011)
    • Place of Presentation
      Berliner Congress Center (Berlin, Germany)
    • Year and Date
      2011-09-20
  • [Remarks]

    • URL

      http://mems.me.tut.ac.jp/

URL: 

Published: 2014-09-25  

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