2012 Fiscal Year Final Research Report
Development of surface profile measurement method for ellipsoidal mirrors
| Project/Area Number |
23656106
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
MIMURA Hidekazu 東京大学, 大学院・工学系研究科, 准教授 (30362651)
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| Project Period (FY) |
2011 – 2012
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| Keywords | X 線ミラー / 位相回復 / 形状計測 |
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| Research Abstract |
In order to realize a soft X-ray nanobeam by an ellipsoidal mirror, measurement of its surface profile is necessary. In this study, feasibility studies on application of phase retrieval with coherent X-rays were carried out. Several simulations and experiments using visible light indicate that the proposed idea is promising.
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