2012 Fiscal Year Final Research Report
Development of reference-less wavelength scanning interferometerfor micro aspherical lens
| Project/Area Number |
23656111
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The Graduate School for the Creation of New Photonics Industries |
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Principal Investigator |
HANAYAMA Ryohei 光産業創成大学院大学, 光産業創成研究科, 助教 (20418924)
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| Co-Investigator(Kenkyū-buntansha) |
ISHII Katsuhiro 光産業創成大学院大学, 光産業創成研究科, 准教授 (30311517)
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| Project Period (FY) |
2011 – 2012
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| Keywords | 精密位置決め・加工計測 / 光干渉計測 |
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| Research Abstract |
In this research, we developed two types of interferometercharacterized in that reference surface is not necessary. One is polar coordinate shearinginterferometer, which realizes wave front shearing for rotational and radial direction.Another is zero-method interferometer using spatial light modulator as a reference mirror.In the interferometer, the dynamic range was expanded by zero-methodology. Moreover, theevaluation method of phase detection algorithms were also developed. It is of assistance ofimprovement of phase detection algorithms.
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