2012 Fiscal Year Final Research Report
Accurate process planning of MEMS devices using multi-resolution mesh models
| Project/Area Number |
23656112
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Hokkaido University |
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Principal Investigator |
KANAI Satoshi 北海道大学, 大学院・情報科学研究科, 教授 (90194878)
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| Co-Investigator(Kenkyū-buntansha) |
DATE Hiroaki 北海道大学, 大学院・情報科学研究科, 准教授 (20374605)
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| Co-Investigator(Renkei-kenkyūsha) |
SHIBATA Takayuki 豊橋技術科学大学, 工学(系)研究科(研究院), 教授 (10235575)
KAWASHIMA Takahiro 豊橋技術科学大学, 工学(系)研究科(研究院), 准教授 (50378270)
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| Project Period (FY) |
2011 – 2012
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| Keywords | MEMS, 工程設計 / 形状モデリング / ソリッドモデル / メッシュモデル |
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| Research Abstract |
The objective of this study is to enable designers who are not necessarily the experts on MEMS(Micro Electro Mechanical Systems) manufacturing processes to easily plan the feasible and low-cost manufacturing processes of MEMS devices. To achieve this, a prototype of the computer-aided process planning system of MEMS devices was developed where (1) all feasible process plans of the device could be searched for and (2) device shapes and structures easier to fabricate could be estimated automatically based on the multi-resolution mesh model of the devices.
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