Micro flow sensor based on the impedance of the electrical doubolelayer

2012 Fiscal Year Final Research Report

• Project/Area Number: 23656266
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Measurement engineering
• Research Institution: Kumamoto University
• Principal Investigator: TORIGOE Ippei 熊本大学, 自然科学研究科, 教授 (40134663)
• Project Period (FY): 2011 – 2012
• Keywords: 電気二重層 / マイクロフロー / インピーダンス

Research Abstract

We proposed an impedeance based flow sensor which measures the flow velocitythrough a micro channel on the basis of the interactions between the flow and theelectrical double layer . Several experiments were performed using an electrode chipfabricated by FIB. The results showed the following: (1) the impedance of the electrodechanges in approximate proportion with the flow velocity , (2) the real and imaginarycomponent of the impedance shows a different change, (3) the behavior of the twocomponents depends on the direction angle between the flow and the electric field.