Development of non-contact lithography toward 10 nm-node

2013 Fiscal Year Final Research Report

• Project/Area Number: 23686026
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: Hokkaido University
• Principal Investigator: UENO Kosei 北海道大学, 電子科学研究所, 准教授 (00431346)
• Project Period (FY): 2011-04-01 – 2014-03-31
• Keywords: 10 nm-node / ナノギャップ / ナノ・マイクロ加工 / プラズモニクス / 近接場リソグラフィー

Research Abstract

The nano-photolithography technology which carries out transcription exposure of the nanopattern with a nanometric accuracy on a positive photoresist surface was constructed using the feature with possible the metallic nanostructure which shows localized surface plasmon resonance making a nanometer-sized spatial region localize electromagnetic field. As the result, it succeeded in attaining principle verification of the non-contact nano-lithography technology of unexplored 10 nm-node.

Research Products

• [Journal Article] Photoelectrochemical Behavior of Self-assembled Ag/Co Plasmonic Nanostructures capped with TiO_2 (2014)
  • Author(s): A. Watanabe, Y. Kotake, Y. Kamata, A. Chikamatsu, K. Ueno, H. Misawa, T. Hasegawa
  • Journal Title: J. Phys. Chem. Lett Volume: 5 Pages: 25-29
  • Peer Reviewed
• [Journal Article] 可視光局在プラズモンの人工光合成への展開 (2014)
  • Author(s): 上野貢生, 三澤弘明
  • Journal Title: 化学工業 Volume: 65 Pages: 21-25
• [Journal Article] Improvement of plasmon-enhanced photocurrent generation by interference of TiO_2 thin-film (2013)
  • Author(s): X. Shi, K. Ueno, T. Oshikiri, H. Misawa
  • Journal Title: J. Phys. Chem. C Volume: 117 Pages: 24733-24739
  • Peer Reviewed
• [Journal Article] Direct imaging of the near field and dynamics of surface plasmon resonance on gold nanostructures using photoemission electron microscopy (2013)
  • Author(s): Q. Sun, K. Ueno, H. Yu, A. Kubo, Y. Matsuo, H. Misawa
  • Journal Title: Light : Science & Applications Volume: 2 Pages: e118
  • Peer Reviewed
• [Journal Article] Plasmon-enhanced photocurrent generation and water oxidation from visible to near-infrared wavelengths (2013)
  • Author(s): K. Ueno, H. Misawa
  • Journal Title: NPG Asia Mater Volume: 5 Pages: e61
  • Peer Reviewed
• [Journal Article] Optical properties of gold nano-bowtie structures (2013)
  • Author(s): G. Bi, L. Wang, L. Ling, Y. Yokota, Y. Nishijima, K. Ueno, H. Misawa, J.-R. Qiu
  • Journal Title: Opt. Commun Volume: 294 Pages: 213-217
  • Peer Reviewed
• [Journal Article] Surface plasmon-enhanced photochemical reactions (2013)
  • Author(s): K. Ueno, H. Misawa
  • Journal Title: J. Photochem. Photobiol. C Volume: 15 Pages: 31-52
  • Peer Reviewed
• [Journal Article] Spectral Properties and Electromagnetic Field Enhancement Effects on Nano-Engineered Metallic Nanoparticles (2013)
  • Author(s): K. Ueno, H. Misawa
  • Journal Title: Phys. Chem. Chem. Phys Volume: 15 Pages: 4093-4099
  • Peer Reviewed
• [Journal Article] Optical Field Imaging of Elongated Rectangular Nanovoids in Gold Thin Film (2013)
  • Author(s): K. Imura, K. Ueno, H. Misawa, H. Okamoto
  • Journal Title: J. Phys. Chem. C Volume: 117 Pages: 2449-2454
  • Peer Reviewed
• [Journal Article] Plasmon-enhanced photocurrent generation and water oxidation with a gold nanoisland loaded titanium dioxide photoelectrode (2013)
  • Author(s): X. Shi, K. Ueno, N. Takabayashi, H. Misawa
  • Journal Title: J. Phys. Chem. C Volume: 117 Pages: 2494-2499
  • Peer Reviewed
• [Journal Article] Precisely controlled plasmonic nanostructures and its application to nanolithography (2013)
  • Author(s): K. Ueno, H. Misawa
  • Journal Title: Proc. SPIE Volume: 8613 Pages: 861302-1-7
• [Journal Article] Surface plasmon-enhanced molecular fluorescence induced by gold nanostructures (2012)
  • Author(s): Y. Teng, K Ueno, X. Shi, D. Aoyo, J.-R. Qiu, H. Misawa
  • Journal Title: Ann. der Physik Volume: 524 Pages: 733-740
  • Peer Reviewed
• [Journal Article] Improving surface plasmon detection in gold nanostructures using a multi-polarization spectral integration method (2012)
  • Author(s): K.-L. Lee, M.-J. Chih, X. Shi, K. Ueno, H. Misawa, P.-K. Wei
  • Journal Title: Adv. Mater Volume: 24 Pages: 253-259
  • Peer Reviewed
• [Journal Article] Photoluminescence enhancement induced from silver nanoparticles in Tb^<3+>-doped glass ceramics (2012)
  • Author(s): G. Bi, L. Wang, W. Xiong, K. Ueno, H. Misawa, J.-R. Qiu
  • Journal Title: Chin. Opt. Lett Volume: 10 Pages: 092401
  • Peer Reviewed
• [Journal Article] Fabrication of nano-engineered metallic structures and their application to non-linear photochemical reactions (2012)
  • Author(s): K. Ueno, H. Misawa
  • Journal Title: Bull. Chem. Soc. Jpn Volume: 85 Pages: 843-853
  • Peer Reviewed
• [Journal Article] Enhancement of a two-photon-induced reaction in solution using light-harvesting gold nanodimer structures (2012)
  • Author(s): B. Wu, K. Ueno, Y. Yokota, K. Sun, H. Zeng, H. Misawa
  • Journal Title: J. Phys. Chem. Lett Volume: 3 Pages: 1443-1447
  • Peer Reviewed
• [Journal Article] Near-infrared plasmon-assisted water oxidation (2012)
  • Author(s): Y. Nishijima, K. Ueno, Y. Kotake, K. Murakoshi, H. Inoue, H. Misawa
  • Journal Title: J. Phys. Chem. Lett Volume: 3 Pages: 1248-1252
  • Peer Reviewed
• [Journal Article] Quantitative Measurement of the Near-Field Enhancement of Nanostructures by Two-Photon Polymerization (2012)
  • Author(s): T. Geldhauser, A. Kolloch, N. Murazawa, K. Ueno, J. Boneberg, P. Leiderer, E. Scheer, H. Misawa
  • Journal Title: Langmuir Volume: 28 Pages: 9041-9046
  • Peer Reviewed
• [Journal Article] Effect of the distance between adherent mesenchymal stem cell and the focus of irradiation of femtosecond laser on cell replication capacity (2012)
  • Author(s): J. Sakai, D. Roldan, K. Ueno, H. Misawa, Y. Hosokawa, T. Iino, S. Wakitani, M. Takagi
  • Journal Title: Cytotechnology Volume: 64 Pages: 323-329
  • Peer Reviewed
• [Journal Article] Fabrication of periodical structure and shape-induced modulating spectroscopy of Au nanoparticles (2012)
  • Author(s): G. Bi, W. Xiong, L. Wang, K. Ueno, H. Misawa, J.-R. Qiu
  • Journal Title: Opt. Commun Volume: 285 Pages: 2472-2477
  • Peer Reviewed
• [Journal Article] In situ investigation of the shrinkage of photopolymerized micro/nanostructures : The effect of the drying process (2012)
  • Author(s): Q. Sun, K. Ueno, H. Misawa
  • Journal Title: Opt. Lett Volume: 37 Pages: 710-712
  • Peer Reviewed
• [Journal Article] Plasmon-induced local photocurrent changes in GaAs photovoltaic cells modified with gold nanospheres : A near-field imaging study (2011)
  • Author(s): Y. Harada, K. Imura, H. Okamoto,Y. Nishijima, K. Ueno, H. Misawa
  • Journal Title: J. Appl. Phys Volume: 110 Pages: 104306-1-7
  • Peer Reviewed
• [Journal Article] Nanogap-assisted surface plasmon nanolithography (2011)
  • Author(s): Z. Li, K. Sun, M. Sunayama, R. Araki, K. Ueno, M. Abe, H. Misawa
  • Journal Title: Electrophoresis Volume: 32 Pages: 3392-3398
  • Peer Reviewed
• [Journal Article] Real-time imaging of acoustic rectification (2011)
  • Author(s): S. Danworaphong, T. A. Kelf, O. Matsuda, M. Tomoda, Y. Tanaka, N. Nishiguchi, O. B. Wright, Y. Nishijima, K. Ueno, S. Juodkazis, H. Misawa
  • Journal Title: Appl. Phys. Lett Volume: 99 Pages: 201910-1-3
  • Peer Reviewed
• [Journal Article] Fabrication of Au/Si nanocomposite surface structure using nanosecond pulsed laser irradiation (2011)
  • Author(s): Y. Yoshida, S. Watanabe, Y. Nishijima, K. Ueno, H. Misawa, T. Kato
  • Journal Title: Nanotechnology Volume: 22 Pages: 375607-1-7
  • Peer Reviewed
• [Journal Article] Spectral properties of nanoengineered Ag/Au bilayer rods fabricated by electron beam lithography (2011)
  • Author(s): L. Wang, W. Xiong, Y. Nishijima, Y. Yokota, K. Ueno, H. Misawa, J. R. Qiu, G. Bi
  • Journal Title: Appl. Opt Volume: 50 Pages: 5600-5605
  • Peer Reviewed
• [Journal Article] Modifying Plasmonic Spectral Properties of Engineered Silver Nanoblocks by Using Titanium Coating (2011)
  • Author(s): L. Wang, W. Xiong, Y. Nishijima, Y. Yokota, K. Ueno, H. Misawa, G. Bi, J. Qiu
  • Journal Title: IEEE Photonic. Tech. L Volume: 23 Pages: 1216-1218
  • Peer Reviewed
• [Journal Article] Protein Crystallization Induced by Strong Photons-molecules Coupling Fields Photochemical Reaction (2011)
  • Author(s): S. Haruta , H. Misawa , K. Ueno, Y. Yokota , H. Uehara , H. Hiratsuka, H. Horiuchi, T. Okutsu
  • Journal Title: J. Photochem. Photobiol. A : Chem Volume: 221 Pages: 268-272
  • Peer Reviewed
• [Journal Article] Plasmon coupling and coherent acoustic phonon dynamics of periodic gold pair nanocuboids by near-IR transient absorption spectroscopy (2011)
  • Author(s): L. Wang, Y. Nishijima, K. Ueno, H. Misawa, N. Tamai
  • Journal Title: J. Photochem. Photobiol. A : Chem Volume: 221 Pages: 164-168
  • Peer Reviewed
• [Journal Article] Hybrid states dynamics of gold nanorods/dye J-aggregate under strong coupling (2011)
  • Author(s): Y.-W. Hao, H.-Y. Wang, Y. Jiang, Q.-D. Chen, K. Ueno, W.-Q. Wang, H. Misawa, H.-B. Sun
  • Journal Title: Angew. Chem. Int. Ed Volume: 50 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Homogeneous nano-patterning using plasmon assisted photolithography (2011)
  • Author(s): K. Ueno, S. Takabatake, K. Onishi, H. Itoh, Y. Nishijima, H. Misawa
  • Journal Title: Appl. Phys. Lett Volume: 99 Pages: 011107-1-3
  • Peer Reviewed
• [Journal Article] Spatial polarization sensitivity of single Au bowtie nanostructures (2011)
  • Author(s): E. Wu, Y. Chi, B. Wu, K. Xia, Y. Yokota, K. Ueno, H. Misawa, H. Zeng
  • Journal Title: J. Lumin Volume: 131 Pages: 1971-1974
  • Peer Reviewed
• [Journal Article] Spectral properties and mechanism of instability of nanoengineered silver blocks (2011)
  • Author(s): L. Wang, W. Xiong, Y. Nishijima, Y. Yokota, K. Ueno, H. Misawa, G. Bi, J.-R. Qiu
  • Journal Title: Opt. Express Volume: 19 Pages: 10640-10646
  • Peer Reviewed
• [Journal Article] Direct imaging of nanogap-mode plasmon-resonant fields (2011)
  • Author(s): Y. Tanaka, H. Ishiguro, H. Fujiwara, Y. Yokota, K. Ueno, H. Misawa, K. Sasaki
  • Journal Title: Opt. Express Volume: 19 Pages: 7726-7733
  • Peer Reviewed
• [Journal Article] Femtosecond and picosecond near-field ablation of gold nanotriangles : Nanostructuring and Nanomelting (2011)
  • Author(s): A. Kolloch, T. Geldhauser, K. Ueno, H. Misawa, J. Boneberg, A. Plech, P. Leiderer
  • Journal Title: Appl. Phys. A Volume: 104 Pages: 793-799
  • Peer Reviewed
• [Journal Article] Surface plasmon-assisted nanolithography with nanometric accuracy (2011)
  • Author(s): K. Ueno, H. Misawa
  • Journal Title: Proc. SPIE Volume: 8243 Pages: 82430F-1-8
• [Journal Article] Achieving single-nanometer-size dots with photolithography (2011)
  • Author(s): K. Ueno, H. Misawa
  • Journal Title: SPIE News Room
  • DOI: 10.1117/2.1201109.003842
• [Journal Article] Photochemical reaction fields with Strong coupling between a photon and a molecule (2011)
  • Author(s): K. Ueno, H. Misawa
  • Journal Title: J. Photochem. Photobiol. A : Chem Volume: 221 Pages: 130-137
  • Peer Reviewed
• [Journal Article] プラズモニクスと光化学反応 (2011)
  • Author(s): 上野貢生, 三澤弘明
  • Journal Title: 応用物理 Volume: 80 Pages: 766-771
• [Presentation] プラズモン増強場を用いた表面化学反応 (2014)
  • Author(s): 上野貢生
  • Organizer: 平成25年度日本表面科学会東北・北海道支部学術講演会
  • Place of Presentation: 東北大学
  • Year and Date: 2014-03-10
  • Invited
• [Presentation] プラズモン放射圧を利用した遠赤外分光イメージング技術 (2014)
  • Author(s): 上野貢生
  • Organizer: 2013年度日本分光学会北海道支部シンポジウム
  • Place of Presentation: 北海道大学
  • Year and Date: 2014-01-24
  • Invited
• [Presentation] Fabrication and characterization of metallic nanostructures with single nanometer-sized gap (2013)
  • Author(s): K. Ueno
  • Organizer: 26th International Microprocesses and Nanotechnology Conference (MNC 2013)
  • Place of Presentation: Royton Sapporo
  • Year and Date: 2013-11-08
  • Invited
• [Presentation] プラズモン増強を用いた表面光化学反応 (2013)
  • Author(s): 上野貢生
  • Organizer: 第78回表面科学研究会ナノスケールの振動分光の最前線
  • Place of Presentation: 東京工業大学
  • Year and Date: 2013-10-18
  • Invited
• [Presentation] プラズモニック構造を利用した光化学反応制御 (2013)
  • Author(s): 上野貢生
  • Organizer: 日本物理学会2013年秋季年会
  • Place of Presentation: 徳島大学
  • Year and Date: 2013-09-27
  • Invited
• [Presentation] Plasmonic chemistry and its application to nanolithography and infrared sensor (2013)
  • Author(s): K. Ueno
  • Organizer: Symposium on Plasmon-based Chemistry and Physics (ICP2013 preconference)
  • Place of Presentation: KU Leuven, Belgium
  • Year and Date: 2013-07-20
  • Invited
• [Presentation] Precisely controlled plasmonic nanostructures and its application to nanolithography (2013)
  • Author(s): K. Ueno
  • Organizer: SPIE Photonic West 2013
  • Place of Presentation: The Moscone Center San Francisco, USA
  • Year and Date: 2013-02-05
  • Invited
• [Presentation] Plasmon-Enhanced Photochemical Reactions on Nano-Engineered Gold Particles (2012)
  • Author(s): K. Ueno
  • Organizer: 25th International Microprocesses and Nanotechnology Conference (MNC 2012)
  • Place of Presentation: Kobe Meriken Park Oriental Hotel
  • Year and Date: 2012-11-01
  • Invited
• [Presentation] Plasmonic nanostructures for chemical applications (2012)
  • Author(s): K. Ueno
  • Organizer: Japan-India Bilateral Seminar on Supramolecular Nanomaterials for Energy Innovation
  • Place of Presentation: Alpha Anabuki Hall Takamatsu
  • Year and Date: 2012-10-16
  • Invited
• [Presentation] Plasmon-assisted nanolithography exposed by femtosecond laser beam through gold nanostructured photomasks (2012)
  • Author(s): K. Ueno
  • Organizer: 31th International Congress on Applications of Lasers & Electro-Optics (ICALEO2012)
  • Place of Presentation: Anaheim Marriot Hotel, USA
  • Year and Date: 2012-09-26
  • Invited
• [Presentation] 制御された金属ナノ構造による光増強場の創製と化学反応への応用 (2012)
  • Author(s): 上野貢生
  • Organizer: 日本化学会第92春季年会
  • Place of Presentation: 慶應義塾大学
  • Year and Date: 2012-03-27
  • Invited
• [Presentation] プラズモンナノ光リソグラフィーによる高分解能フォトレジストパターンの形成 (2012)
  • Author(s): 上野貢生, 三澤弘明
  • Organizer: 第123回微小光学研究会「超精密微小光学」
  • Place of Presentation: 東海大学
  • Year and Date: 2012-03-01
  • Invited
• [Presentation] Localized Surface Plasmons for Nano-Fabrication (2012)
  • Author(s): K. Ueno
  • Organizer: 2nd Japan-France Frontiers of Engineering (JFFoE)
  • Place of Presentation: Nanoscience, Kyoto International Conference Center
  • Year and Date: 2012-02-27
  • Invited
• [Presentation] Surface plasmon-assisted nanolithography with nanometric accuracy (2012)
  • Author(s): K. Ueno
  • Organizer: SPIE Photonic West 2012
  • Place of Presentation: The Moscone Center, USA
  • Year and Date: 2012-02-15
  • Invited
• [Presentation] Plasmon-Enhanced Photocurrent Generation and Its Application to Artificial Photosynthesis system (2011)
  • Author(s): K. Ueno
  • Organizer: 12th RIES-Hokudai International Symposium "観"
  • Place of Presentation: Chateraise Gateaux Kingdom Sapporo
  • Year and Date: 2011-11-21
  • Invited
• [Presentation] Chemical applications of metallic nanostructures showing localized surface plasmon resonance (2011)
  • Author(s): K. Ueno
  • Organizer: Extreme Photonics Seminar
  • Place of Presentation: 理化学研究所
  • Year and Date: 2011-10-28
  • Invited
• [Presentation] Surface Plasmon-Assisted Nanolithography (2011)
  • Author(s): K. Ueno
  • Organizer: BIT's 1st Annual World Congress of Nano-S & T
  • Place of Presentation: Dalian World EXPO Center, China
  • Year and Date: 2011-10-23
  • Invited
• [Presentation] プラズモン増強場の創成と化学的応用 (2011)
  • Author(s): 上野貢生
  • Organizer: 2011年度日本分光学会北海道支部シンポジウム
  • Place of Presentation: 北海道大学
  • Year and Date: 2011-10-06
  • Invited
• [Presentation] プラズモン増強場を用いた光ナノ加工技術 (2011)
  • Author(s): 上野貢生
  • Organizer: 第75回レーザ加工学会講演会
  • Place of Presentation: 関西大学
  • Year and Date: 2011-05-12
  • Invited
• [Book] 2.電子ビームリソグラフィー,プラズモンナノ材料開発の最前線と応用 (2013)
  • Author(s): 上野貢生, 三澤弘明(分担執筆)
  • Total Pages: 87-93
  • Publisher: シーエムシー出版
• [Book] プラズモニック化学,金属および半導体ナノ粒子の科学 (2012)
  • Author(s): 上野貢生, 三澤弘明(分担執筆)
  • Total Pages: 81-87
  • Publisher: 化学同人
• [Book] Strong photon-molecule coupling fields for chemical reactions (2011)
  • Author(s): K. Ueno, H. Misawa
  • Total Pages: 39, 228-255
  • Publisher: Photochemistry
• [Book] 14.プラズモニクスの光化学的アプローチ,プラズモニクス−光・電子デバイス開発最前線 (2011)
  • Author(s): 上野貢生, 三澤弘明(分担執筆)
  • Total Pages: 3-12
  • Publisher: エヌ・ティー・エス
• [Remarks]
  • URL: http://www.kueno.com/
• [Patent(Industrial Property Rights)] 光電変換装置及び光電変換装置の製造方法 (2013)
  • Inventor(s): 三澤 弘明, 上野 貢生, 小竹 勇己
  • Industrial Property Rights Holder: 北海道大学
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 特願2013-042858
  • Filing Date: 2013-03-05
  • Overseas
• [Patent(Industrial Property Rights)] 金属構造体 (2012)
  • Inventor(s): 上野 貢生, 三澤 弘明, 坪井 泰之, サウリウス ヨードカジス, ビガンタス ミ ゼイキス, 笹木 敬司
  • Industrial Property Rights Holder: ローム株式会社
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 特許5137344
  • Acquisition Date: 2012-11-22
  • Overseas