2012 Fiscal Year Final Research Report
Fabrication of epoxy-based molecular permeable membrane and analysis of membrane characteristics using coarse-grained molecular dynamics simulation
| Project/Area Number |
23710148
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | Kyoto University |
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Principal Investigator |
HIRAI Yoshikazu 京都大学, 先端医工学研究ユニット, 特定助教 (40452271)
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| Project Period (FY) |
2011 – 2012
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| Keywords | リソグラフィ / 粗視化分子動力学 / 分子透過膜 / フォトレジスト / 弾性率 |
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| Research Abstract |
Biocompatible permeable membranes integrated with a microfluidic system, which allow the diffusion of biological molecules with certain molecular weight, are desirable in biomedical applications. This study reports on a molecular level study of the molecules permeability of epoxy-based chemically-amplified photoresists by employing a coarse-grained molecular dynamics simulation. For analyzing mechanical property and diffusion coefficient of molecular in photoresists, Kremer-Grest model with an extended angle bending potential was employed. The simulation results show the same tendency with the experimental results, and which suggests photoresist membrane can be used as permeable membranes with controllable permeability by varying lithography parameters.
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