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2013 Fiscal Year Final Research Report

Research on the ultra-thin film mechanical resonator for high resolution wavelength detection

Research Project

  • PDF
Project/Area Number 23760025
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionThe University of Tokyo

Principal Investigator

KOMETANI Reo  東京大学, 工学(系)研究科(研究院), 講師 (90466780)

Project Period (FY) 2011 – 2013
Keywordsナノメカニクス / プラズモニクス / 超薄膜 / 集束イオンビーム / ナノ機械振動子 / NEMS / 波長計測 / 光通信
Research Abstract

Aim of this study is development of a high resolution wavelength detector for a next generation large-capacity access network. Wavelength measurement had been researched using a nanomechanical resonator and plasmonic structure. In addition, Q factor improvement method had been researched in order to achieve the high resolution wavelength detection. As a result, strain applying method using clamp bending of a resonator was useful to obtain a high Q factor mechanical resonator. And, the wavelength detection with a resolution of 2.2 pm was demonstrated by a nanomechanical resonator with U-shaped cavities.

  • Research Products

    (30 results)

All 2014 2013 2012 2011 Other

All Journal Article (8 results) (of which Peer Reviewed: 7 results) Presentation (19 results) (of which Invited: 2 results) Book (1 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Superconductivity in Tungsten-Carbide Nanowires Deposited from the Mixtures of W(CO)6 and C14H102013

    • Author(s)
      J. Dai, K. Onomitsu, R. Kometani, Y. Krockenberger, H. Yamaguchi, S. Ishihara, Shin'ichi Warisawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Pages: 075001

    • DOI

      10.7567/JJAP.52.075001

    • Peer Reviewed
  • [Journal Article] Growth of ultra-long horizontal free-space-nanowire by the real-time feedback control of the scanning speed on focused-ion-beam chemical vapor deposition2013

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, S. Ishihara
    • Journal Title

      Journal of Vacuum Science & Technology B

      Volume: 31 Pages: 061601

    • Peer Reviewed
  • [Journal Article] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012

    • Author(s)
      S. Warisawa, K. Kuroda, S. Chen, R. Kometani, S. Ishihara
    • Journal Title

      J. Photopolym.Sci. Technol.

      Volume: 25 Pages: 37

    • DOI

      10.2494/photopolymer.25.37,10.1116/1.4824170

    • Peer Reviewed
  • [Journal Article] Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition2012

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, S. Ishihara
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Pages: 065001

    • DOI

      10.1143/JJAP.51.065001

    • Peer Reviewed
  • [Journal Article] Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition2012

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa Sunao Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 30 Pages: 06FD03

    • DOI

      10.1116/1.4766315

  • [Journal Article] High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain2012

    • Author(s)
      Y. Oshidari, T. Hatakeyama, R. Kometani, S. Warisawa, S. Ishihara
    • Journal Title

      Appl. Phys. Express

      Volume: 5 Pages: 117201

    • DOI

      10.1143/APEX.5.117201

    • Peer Reviewed
  • [Journal Article] Dynamic Characteristics Control of DLC Nano-Resonator Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2011

    • Author(s)
      R. Kometani, S. Nishi, S. Warisawa, S.Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Pages: 06FE03

    • DOI

      10.1116/1.3662493

    • Peer Reviewed
  • [Journal Article] Carbon nanomechanical resonator fabrication from PMMA by FIB/ electron-beam dual-beam lithography2011

    • Author(s)
      R. Kometani, T. Hatakeyama, K. Kuroda, S. Warisawa, S.Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Pages: 06FE06

    • DOI

      10.1116/1.3662083

    • Peer Reviewed
  • [Presentation] 走査電子顕微鏡を利用した微小機械振動子の動特性プロファイリング2014

    • Author(s)
      米谷 玲皇,中野 和洋,石原 直,割澤 伸一
    • Organizer
      2014年第34回応用物理学会春季田学術講演会
    • Place of Presentation
      青山学院大学,神奈川県
    • Year and Date
      2014-03-18
  • [Presentation] The growth height correction on the three-dimensional nanostructure fabrication using focused-ion-beam chemical vapor deposition2013

    • Author(s)
      R. Kometani, Y. Murao, S. Ishihara, S. Warisawa
    • Organizer
      26th International Microprocesses and Nanotechnology Conference (MNC2013)
    • Place of Presentation
      Oral, Royton Sapporo, Hokkaido, Japan
    • Year and Date
      2013-11-07
  • [Presentation] 荷電粒子ビーム技術とナノメカニクス研究2013

    • Author(s)
      米谷 玲皇
    • Organizer
      公益社団法人 新化学技術推進協会 電子情報技術部会MEMS分科会講演会
    • Place of Presentation
      新化学技術推進協,東京都
    • Year and Date
      2013-10-15
    • Invited
  • [Presentation] ナノメカニクスとその波長計測への応用2013

    • Author(s)
      米谷 玲皇
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学,京都府
    • Year and Date
      2013-09-16
    • Invited
  • [Presentation] FIB-CVDを用いた3 次元ナノ構造形成における構造形成高さの補正2013

    • Author(s)
      米谷 玲皇,村尾 裕規,石原 直,割澤 伸一
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学,大阪府
    • Year and Date
      2013-09-13
  • [Presentation] Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection2013

    • Author(s)
      Reo Kometani, Hui Liu, Shin'ichi Warisawa, Sunao Ishihara
    • Organizer
      The 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2013)
    • Place of Presentation
      Oral, Nashville, US
    • Year and Date
      2013-05-31
  • [Presentation] 光波長検出微小機械振動子の作製と特性評価2013

    • Author(s)
      米谷 玲皇,劉 琿,割澤 伸一,石原 直
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学,神奈川県
    • Year and Date
      2013-03-29
  • [Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012

    • Author(s)
      R. Kometani, S. Mifune, S. Warisawa and S. Ishihara
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Oriental Hotel, Kobe, Japan
    • Year and Date
      2012-11-01
  • [Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      38th International Micro & Nano Engineering Conference (MNE 2012)
    • Place of Presentation
      Toulouse, France(ポスター)
    • Year and Date
      2012-09-17
  • [Presentation] FIB/EB 複合リソグラフィーによるHSQ からの3 次元ナノ構造作製2012

    • Author(s)
      米谷 玲皇,黒田 耕平,割澤 伸一,石原 直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学,愛媛県
    • Year and Date
      2012-09-12
  • [Presentation] FIB/EB Dual-beam Lithography2012

    • Author(s)
      R. Kometani
    • Organizer
      Next Generation Lithogtaphy Workshop 2012 (NGL2012)
    • Place of Presentation
      東京工業大学,東京都
    • Year and Date
      2012-07-20
  • [Presentation] The three-dimensional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2012)
    • Place of Presentation
      Hawaii, USA(口頭)
    • Year and Date
      2012-05-31
  • [Presentation] FIB/EB 複合リソグラフィーによるカーボンナノ機械振動子の作製とその特性評価2012

    • Author(s)
      米谷 玲皇,畠山 大輝,黒田 耕平, 割澤 伸一,石原 直
    • Organizer
      2012年第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学,東京都
    • Year and Date
      2012-03-15
  • [Presentation] Q Factor Improvement of DLC Nanoresonator using a Fluorine Surface Coating2011

    • Author(s)
      R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      The 6th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2011)
    • Place of Presentation
      Omiya Sonic City, Saitama, Japan(口頭)
    • Year and Date
      2011-11-10
  • [Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-beam Lithography and Annealing Treatment2011

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      24th International Microprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      ANA Hotel Kyoto, Kyoto, Japan(口頭)
    • Year and Date
      2011-10-27
  • [Presentation] FIB/EB デュアルビームリソグラフィーによるカーボンナノ機械振動子の作製2011

    • Author(s)
      米谷 玲皇,畠山 大輝,黒田 耕平, 割澤 伸一,石原 直
    • Organizer
      2011年第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      タワーホール船橋,東京都
    • Year and Date
      2011-09-26
  • [Presentation] Relationship between Q factor and the surface condition of the DLC nanoresonator fabricated by focused-ion-beam chemical vapor deposition2011

    • Author(s)
      R. Kometani, H. Shimizu, S. Warisawa, S. Ishihara
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      Berlin, Germany(ポスター)
    • Year and Date
      2011-09-20
  • [Presentation] Carbon Nanomechanical Resonator Fabrication from PMMA by FIB/EB Dual-Beam Lithography2011

    • Author(s)
      R. Kometani, T. Hatakeyama, K. Kuroda, S. Warisawa, S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA(口頭)
    • Year and Date
      2011-06-02
  • [Presentation] Dynamic Characteristics Control of DLC Nano-Resonator Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2011

    • Author(s)
      R. Kometani, S. Nishi, S. Warisawa, S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA(ポスター)
    • Year and Date
      2011-06-01
  • [Book] ナノ・マイクロスケール機械工学(石原直, 加藤千幸, 光石衛, 渡邊聡[編])2014

    • Author(s)
      米谷玲皇
    • Total Pages
      第3章3.2.3節,第4章4.1.3節,及び4.2.3節
    • Publisher
      東京大学出版会
  • [Remarks] 東京大学大学院工学系研究科機械工学専攻 米谷研究室ホームページ

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/

  • [Patent(Industrial Property Rights)] 光検出振動子、光波長計測装置、光波長計測方法、および光検出振動子の作製方法2013

    • Inventor(s)
      米谷玲皇,石原直,割澤伸一,劉琿,守屋和樹,山口浩司,岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話株式会社
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      特願2013-171972
    • Filing Date
      2013-08-22

URL: 

Published: 2015-06-25  

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