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2013 Fiscal Year Final Research Report

Construction of advanced observation system for semiconductor defect using scanning positron microbeam and electron beam induced current method

Research Project

  • PDF
Project/Area Number 23760039
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionJapan Atomic Energy Agency

Principal Investigator

MAEKAWA Masaki  独立行政法人日本原子力研究開発機構, 原子力科学研究部門 先端基礎研究センター, 研究副主幹 (10354945)

Project Period (FY) 2011 – 2013
Keywords陽電子マイクロビーム / 空孔型欠陥 / 空間分布 / EBIC測定 / 欠陥準位 / 再結合中心 / イオン照射
Research Abstract

A complementary study of vacancy defects in Si substrates by using scanning positron microscope (SPM) and electron beam induced current (EBIC) method were demonstrated for the same samples and in the same chamber. Both the S parameter and EBIC contrast were found to be enhanced in the regions containing vacancy defects introduced by ion implantation. That is, the SPM provides a criterion if the spatially resolved carrier recombination centres by the EBIC method are originating from vacancy defects or not.

  • Research Products

    (10 results)

All 2014 2013 2012 2011 Other

All Journal Article (4 results) (of which Peer Reviewed: 3 results) Presentation (5 results) Remarks (1 results)

  • [Journal Article]2014

    • Author(s)
      M.Maekawa and A. Kawasuso
    • Journal Title

      JAEA-Review

    • Peer Reviewed
  • [Journal Article]2013

    • Author(s)
      M.Maekawa and A. Kawasuso
    • Journal Title

      JAEA-Review

      Volume: 2013-059 Pages: 146

    • Peer Reviewed
  • [Journal Article]2013

    • Author(s)
      M.Maekawa and A. Kawasuso
    • Journal Title

      Journal of Physics : Conference Series

      Volume: vol. 443 Pages: 012041(1-4)

  • [Journal Article]2012

    • Author(s)
      M.Maekawa and A. Kawasuso
    • Journal Title

      JAEA-Review

      Volume: 2012-046 Pages: 140

    • Peer Reviewed
  • [Presentation]2013

    • Author(s)
      前川雅樹、河裾厚男
    • Organizer
      第8回高崎量子応用研究シンポジウム
    • Place of Presentation
      高崎シティギャラリー(群馬)
    • Year and Date
      20131000
  • [Presentation]2012

    • Author(s)
      前川雅樹、河裾厚男
    • Organizer
      第7回高崎量子応用研究シンポジウム
    • Place of Presentation
      高崎シティギャラリー(群馬)
    • Year and Date
      20121000
  • [Presentation]2012

    • Author(s)
      前川雅樹、河裾厚男
    • Organizer
      応用物理学会
    • Place of Presentation
      愛媛大学(愛媛)
    • Year and Date
      20120900
  • [Presentation]2012

    • Author(s)
      M. Maekawa and A. Kawasuso
    • Organizer
      16th International Conference of Positron Annihilation
    • Place of Presentation
      ブリストル大学(英国)
    • Year and Date
      20120800
  • [Presentation]2011

    • Author(s)
      前川雅樹、河裾厚男
    • Organizer
      第6回高崎量子応用研究シンポジウム
    • Place of Presentation
      高崎シティギャラリー(群馬)
    • Year and Date
      20111000
  • [Remarks]

    • URL

      http://www.taka.jaea.go.jp/asrc/positron/index_j.html

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Published: 2015-06-25  

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