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2012 Fiscal Year Final Research Report

Three-dimensional shape measurement by imaging ellipsometry

Research Project

  • PDF
Project/Area Number 23760042
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Applied optics/Quantum optical engineering
Research InstitutionYamagata University (2012)
Tohoku University (2011)

Principal Investigator

TSURU Toshihide  山形大学, 地域教育文化学部, 准教授 (30306526)

Project Period (FY) 2011 – 2012
Keywords偏光 / エリプソメトリー / 形状計測
Research Abstract

Ellipsometry is widely utilized for investigating surface and optical properties of thin films. We proposed a new concept for 3D shape measurement of specular objects by ellipsometry. For precise and fast measurement, imaging ellipsometer using a liquid crystal variable retarder was developed. A high precision achieved by our proposed method is expected for 3D shape measurement in various applications.

  • Research Products

    (5 results)

All 2013 2012 2011

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (4 results)

  • [Journal Article] Tilt-ellipsometryof object surface by specularreflection for three-dimensionalshape measurement2013

    • Author(s)
      Toshihide Tsuru
    • Journal Title

      Opt. Express

      Volume: 21 Pages: 6625-6632

    • DOI

      DOI:10.1364/OE.21.006625

    • Peer Reviewed
  • [Presentation] 偏光計測による立体イメージング2012

    • Author(s)
      津留俊英
    • Organizer
      2012年日本光学会年次学術講演会(Optics & Photonics Japan 2012)
    • Place of Presentation
      東京都タワーホール船堀東京都タワーホール船堀
    • Year and Date
      2012-10-24
  • [Presentation] 液晶可変リターダーを用いた傾斜エリプソメトリーによる3次元形状計測2012

    • Author(s)
      津留俊英
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛県愛媛大学・松山大学
    • Year and Date
      2012-09-12
  • [Presentation] 傾斜エリプソメトリーによる3次元形状計測2012

    • Author(s)
      津留俊英
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京都早稲田大学
    • Year and Date
      2012-03-18
  • [Presentation] 偏光イメージングのものづくり現場への応用2011

    • Author(s)
      山本治美、松川裕章、荒木秀和、津留俊英
    • Organizer
      第7回偏光計測研究会
    • Place of Presentation
      東京都東京工芸大学
    • Year and Date
      2011-11-11

URL: 

Published: 2014-09-25  

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