2013 Fiscal Year Final Research Report
Multi-physics simulator for micromachines based on new hybrid strongly coupled analysis
| Project/Area Number |
23760078
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Engineering fundamentals
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| Research Institution | Kyushu Institute of Technology |
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Principal Investigator |
ISHIHARA Daisuke 九州工業大学, 大学院情報工学研究院, 准教授 (80363399)
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| Project Period (FY) |
2011 – 2013
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| Keywords | 計算力学 / マイクロマシン / マルチフィジクス / 有限要素法 / シミュレーション / 振動解析 |
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| Research Abstract |
In this study, a finite element (FE) analysis using hierarchal decompositions for the interaction of structural, fluidic and electrostatic fields is applied for vibration analyses of a MEMS structural component. The interaction is partitioned into the electrostatic field and the fluid-structure interaction (FSI) using the block Gauss-Seidel method. The FSI is split into the pressure and velocity fields using a projection method. The developed FE analysis is applied for a micro cantilever beam actuated by the step electrostatic force in vacuum and air. It was demonstrated from the comparisons among the numerical and experimental results that the proposed analyses provide the results consistent with the experimental results. It follows from the present results that the numerical analyses taking into account the interaction of the structural, fluidic and electrostatic fields are required for the accurate predictions of the vibration characteristics of the MEMS structural components.
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