2012 Fiscal Year Final Research Report
Evaluation of Mechanical Properties of Thin film Structure by UsingMEMS Technology
| Project/Area Number |
23760103
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Ritsumeikan University |
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Principal Investigator |
ANDO Taeko 立命館大学, 理工学部, 准教授 (70335074)
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| Project Period (FY) |
2011 – 2012
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| Keywords | マイクロマシン / マイクロ材料 / 破壊力学 / 半導体材料 |
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| Research Abstract |
The objective of this study is to reveal the factor influencing the fracture property of single crystal silicon in micro- and nano-scale. We have developed the tensile testing device for dealing with microscale samples. Concentration of impurities (B and Ge) in three testing material were different from each other. Measured Young’s modulus and fracture strength decreased with increasing the impurities concentration.
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