2012 Fiscal Year Final Research Report
Characterization and Application of Thin-Film PZT/PZT Bimorph
| Project/Area Number |
23760233
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (B)
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Intelligent mechanics/Mechanical systems
|
|---|
| Research Institution | University of Hyogo |
|---|
Principal Investigator |
KANDA Kensuke 兵庫県立大学, 大学院・工学研究科, 助教 (20446735)
|
|---|
| Project Period (FY) |
2011 – 2012
|
| Keywords | マイクロ / ナノメカトロニクス |
|---|
| Research Abstract |
Double layer Pb[Zr,Ti]O_3(PZT, Lead Zirconate Titanate) thin films was realized for MEMS applications. The total thickness of the bimorph PZT/PZT structure is 5.4 μm, which is much thicker conventionally reported ones (typically 1 μm). In addition, the electric and piezoelectric characteristics for top and bottom PZT layers were consistent with each other. By fabricating MEMS mirror with four PZT/PZT bimorph beams, the applicability of the PZT/PZT bimorph to MEMS fabrication process was confirmed. The bimorph beams doubled the deflection of the MEMS mirror compared with unimorph actuations.These results demonstrate that the PZT/PZT bimorph is effective to MEMS actuators.
|
Research Products
(12 results)
-
-
[Journal Article]2012
Author(s)
K. Kanda, T. Saito, Y. Iga, K. Higuchi, K. Maenaka
-
Journal Title
sensors
Volume: Vol. 12
Pages: 16673-16684
DOI
-
-
-
-
-
-
-
-
-
-
