Development of measuring system for charge distribution

2012 Fiscal Year Final Research Report

• Project/Area Number: 23760377
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Measurement engineering
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: KIKUNAGA Kazuya 独立行政法人産業技術総合研究所, 生産計測技術研究センター, 研究員 (10581283)
• Project Period (FY): 2011 – 2012
• Keywords: 計測システム

Research Abstract

A system for visualizing the electrostatic charge without contact using charged material oscillation method has been developed. There, it was established a technology to convert the information of the charge from an electric field, and a focused ultrasoun

Research Products

• [Journal Article] Measuring technique for static electricity using focused sound
  • Author(s): K. Kikunaga, T. Hoshi, H. Yamashita, Y.Fujii and K. Nonaka
  • Journal Title: Journal of Electrostatics Volume: vol. 71 Pages: 554-557
  • DOI: DOI:10.1016/j.elstat.2012.11.031
  • Peer Reviewed
• [Journal Article] 誘起電界を用いた静電気計測技術
  • Author(s): 菊永 和也、山下 博史、藤井 義貴、野中一洋
  • Journal Title: 電気学会研究会資料 Volume: vol. IM-12 Pages: 19-22
• [Journal Article] A Study of Electrostatic Charge on Insulating Film by Electrostatic Force Microscopy
  • Author(s): K. Kikunaga, K. Toosaka, T. Kamohara, K.Sakai and K. Nonaka
  • Journal Title: Journal of Physics: Conference Series Volume: vol. 301 Pages: 012043-1-012043-4
  • DOI: DOI:10.1088/1742-6596/301/1/012043
  • Peer Reviewed
• [Presentation] 静電気計測のための誘導低周波電界に関する研究 (2013)
  • Author(s): 菊永和也
  • Organizer: 応用物理学会
  • Place of Presentation: 神奈川工科大学(神奈川県)
  • Year and Date: 2013-03-27
• [Presentation] 集束超音波を用いた非近接型静電気計測技術 (2013)
  • Author(s): 菊永和也
  • Organizer: 静電気学会
  • Place of Presentation: 東京大学(東京都)
  • Year and Date: 2013-03-07
• [Presentation] 誘起電界を用いた静電気計測技術 (2012)
  • Author(s): 菊永和也
  • Organizer: 電気学会計測研究会
  • Place of Presentation: 佐賀大学(佐賀県)
  • Year and Date: 2012-11-29
• [Presentation] 集束超音波を用いた静電気分布計測技術の開発 (2012)
  • Author(s): 菊永和也
  • Organizer: 応用物理学会
  • Place of Presentation: 愛媛大学(愛媛県)
  • Year and Date: 2012-09-12
• [Presentation] 音波振動を用いた静電気計測技術 (2012)
  • Author(s): 菊永和也
  • Organizer: 応用物理学会
  • Place of Presentation: 早稲田大学(東京都)
  • Year and Date: 2012-03-16
• [Presentation] Neutralization effect of Static Electricity in Localized Region on Wafer by Electrostatic Force Microscopy (2011)
  • Author(s): K. Kikunaga
  • Organizer: International Symposium on Surface Science
  • Place of Presentation: Tower Hall Funabori, Tokyo
  • Year and Date: 2011-12-14
• [Presentation] Detection of Electrostatic Charge using Charged Material Oscillation (2011)
  • Author(s): K. Kikunaga
  • Organizer: 2nd ISNPEDADM-2011
  • Place of Presentation: Institut de Recherche pour le Developpement, New Caledonia
  • Year and Date: 2011-11-15
• [Presentation] 音波を用いた帯電計測手法の開発 (2011)
  • Author(s): 菊永和也
  • Organizer: 電気学会
  • Place of Presentation: 東京工業大学(東京都)
  • Year and Date: 2011-09-21
• [Presentation] 帯電体振動法を用いた静電気計測技術の開発 (2011)
  • Author(s): 菊永和也
  • Organizer: 静電気学会
  • Place of Presentation: 東京理科大学(東京都)
  • Year and Date: 2011-09-12
• [Presentation] 音波を用いた静電気計測技術の開発 (2011)
  • Author(s): 菊永和也
  • Organizer: 応用物理学会
  • Place of Presentation: 山形大学(山形県)
  • Year and Date: 2011-08-29
• [Presentation] A Study of Electrostatic Charge on Insulating Film by Electrostatic Force Microscopy (2011)
  • Author(s): K. Kikunaga
  • Organizer: 13th International Conference on Electrostatics
  • Place of Presentation: Bangor university , United Kingdom
  • Year and Date: 2011-04-11
• [Patent(Industrial Property Rights)] 静電気量計測装置、静電気量計測方法 (2012)
  • Inventor(s): 菊永和也
  • Industrial Property Rights Holder: 独立行政法人産業技術総合研究所
  • Industrial Property Number: PCT/JP2012/059858
  • Filing Date: 2012-04-11
  • Overseas