Development of precise electrical measurement method in TEM

2014 Fiscal Year Final Research Report

• Project/Area Number: 23760626
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Physical properties of metals
• Research Institution: National Institute for Materials Science
• Principal Investigator: KAWAMOTO Naoyuki 独立行政法人物質・材料研究機構, ナノチューブユニット, MANA研究員 (70570753)
• Project Period (FY): 2011-04-28 – 2015-03-31
• Keywords: 透過電子顕微鏡法 / 微小電気計測 / 局所温度計測 / 熱電対 / ゼーベック効果

Outline of Final Research Achievements

By introducing two nanoscale probes inside a transmission electron microscope (TEM), we promoted to improve an electrical measurement method in TEM for evaluating of electrical and thermal properties. For example, to improve a space resolution and precision of an electrical resistivity measurement, we developed a new sharpened CNT probe welded to a top of W probe and a TEM specimen for supplying a constant current by using an electron lithography and a focused ion beam system (FIB). Moreover, we also developed a local temperature measurement method in TEM as a fundamental technique for thermal resistivity measurement in TEM by assembling a nanoscale thermocouple. By using the developed thermocouple, direct measurement of a temperature increase of specimen on heating by electron beam irradiation and measurement of phonon conduction in a heat radiation composite material could be successfully demonstrated.

Free Research Field

材料科学