2012 Fiscal Year Final Research Report
Clarification of production mechanism of polyimide insupercritical carbon dioxide and application to microfabrication technique
| Project/Area Number |
23760722
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Properties in chemical engineering process/Transfer operation/Unit operation
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| Research Institution | Hiroshima University |
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Principal Investigator |
HARUKI Masashi 広島大学, 大学院・工学研究院, 助教 (90432682)
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| Project Period (FY) |
2011 – 2012
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| Keywords | ポリイミド / 超臨界二酸化炭素 / 薄膜 / 埋め込み / 微細加工 |
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| Research Abstract |
In the present work, the changes of phase behaviors were clarified during reaction of production of polyamic acid, which is intermediate of polyimide, in supercritical carbon dioxide. And the relationship between the polymerization condition and the molecular weight of produced polyamic acid. Moreover, the high-pressure apparatus for microfabrication of polyimide was newly developed, and the relationships operating condition, deposition rate and morphology of polyimide thin film were clarified. Finally, the implantation of polyimide into the microscopic space on the surface of the substrate was discussed.
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