2012 Fiscal Year Final Research Report
A study of power generator from environment energy using MEMSresonators
| Project/Area Number |
23860022
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| Research Category |
Grant-in-Aid for Research Activity Start-up
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| Allocation Type | Single-year Grants |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | The University of Electro-Communications |
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Principal Investigator |
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| Project Period (FY) |
2011 – 2012
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| Keywords | MEMS / エネルギーハーベスティング |
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| Research Abstract |
A MEMS resonator to harvest energy from environmental radio waves has been investigated. An ultra-low power LSI can operate with the energy. A cantilever and torus type MEMS resonators have been investigated. It is clear that torus resonator store larger energy of 8.2E-10[J] than a cantilever does 5.7E-11[J]. A torus resonator was fabricated and we 996KHz resonant frequency is observed which is almost same frequency of the analysis.
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