Study of optical circuit platform for GaN/Si hybrid-photonics

2016 Fiscal Year Final Research Report

• Project/Area Number: 24246019
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied optics/Quantum optical engineering
• Research Institution: Tohoku University
• Principal Investigator: Hane Kazuhiro 東北大学, 工学研究科, 教授 (50164893)
• Co-Investigator(Kenkyū-buntansha): 金森 義明 東北大学, 工学(系)研究科(研究院), 准教授 (10333858) ; 佐々木 敬 東北大学, 工学(系)研究科(研究院), 助教 (60633394)
• Project Period (FY): 2012-04-01 – 2016-03-31
• Keywords: シリコンフォトニクス / ＧａＮ導波路 / ウエハ接合 / ＭＥＭＳ / 光集積回路 / 電気光学効果 / マイクロリング

Outline of Final Research Achievements

The purpose of this study was to develop the optical circuit platform by combining Si and GaN photonics on the basis of micromachining. To realize the functional optical circuits combining GaN active waveguide and Si passive waveguide, the fundamental technologies were developed. In the concrete, bonding a silicon-on-insulator wafer and a Si wafer on which GaN crystal was grown, the optical circuit coupling a GaN microring waveguide and a Si straight waveguide was fabricated, and the optical modulations using an electro-optic effect and other effect were demonstrated. One of the bases for opt-electronic hybrid integration was established.

Free Research Field

微小電気機械システム