Mold making process to reproduce nano-structures without lithography technology

2014 Fiscal Year Final Research Report

• Project/Area Number: 24246027
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: The University of Tokyo
• Principal Investigator: NAKAO Masayuki 東京大学, 工学(系)研究科(研究院), 教授 (90242007)
• Co-Investigator(Kenkyū-buntansha): NAGATO Keisuke 東京大学, 大学院工学系研究科, 講師 (50546231) ; TSUCHIYA Kensuke 東京大学, 生産技術研究所, 准教授 (80345173)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: マイクロ・ナノデバイス / 機械工作・生産工学 / 結晶成長 / エネルギー効率化 / 燃料電池

Outline of Final Research Achievements

This research project develops mold making processes to reproduce nano-structures with several ten nm to several μm in width or height without lithography technology.
Production technologies of nano-structures in the research are: (a)crystallization process of metal nano-wires to make a forest-like surface with needles with several hundred μm diameter of sub-wavelength of visible light, (b)deposition/etching process of the metal nano-wires to transform its shape from a needle to a cone, (c)anodization process with ion-through holes in diameter of sub-wavelength of visible light, (d)etching process to transform its hole's shape from a cylinder to a cone, (e)ball fixing process to make an iceberg-like surface in plating a metal thin film with metal or resin balls.
Molds were prototyped to reproduce the following film/surfaces: (1)DNA fixing film, (2)anti-reflecting film, (3)fuel pole film of SOFC, (4)high heat-flow boiling surface and (5)light extraction film.

Free Research Field

微細加工、超精密加工、創造設計、失敗学