2015 Fiscal Year Final Research Report
Development of functional surface with electro-adhesive effect and the application to fixture element in vacuum and high-temperature environment
Project/Area Number |
24246029
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Research Category |
Grant-in-Aid for Scientific Research (A)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Production engineering/Processing studies
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Research Institution | Keio University |
Principal Investigator |
Aoyama Tojiro 慶應義塾大学, 理工学部, 教授 (70129302)
|
Co-Investigator(Kenkyū-buntansha) |
KAKINUMA Yasuhiro 慶應義塾大学, 理工学部, 准教授 (70407146)
|
Project Period (FY) |
2012-04-01 – 2016-03-31
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Keywords | 機能性表目 / 機能性材料 / トライボロジー |
Outline of Final Research Achievements |
For a fixture device of wafer in semiconductor process under vacuum and high- temperature condition, we worked on development of a functional electro-adhesive surface with micro texture in this study. By impregnating three dimensional micro-mesh structure with an adhesive elastomer, an electro-adhesive surface (EAS) regularly generating numerous adhesive spots on the surface according to applied electric field was successfully developed. From the experiment, it is clear that EAS with one-sided patterned electrodes is able to fix a Si wafer with electro-adhesive effect and works in high-vacuum environment. In addition, the performance of EAS is enhanced at high temperature up to 150 degree Celsius. These results represents high applicability of EAS to a fixture device in high-vacuum and high-temperature process.
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Free Research Field |
生産工学
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