Study on initial growth mechanism of vertically-grown nanographene observed by in-situ TEM

2014 Fiscal Year Final Research Report

• Project/Area Number: 24360015
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Nagoya University
• Principal Investigator: KONDO HIROKI 名古屋大学, 工学(系)研究科(研究院), 准教授 (50345930)
• Co-Investigator(Kenkyū-buntansha): TAKEDA Keigo 名古屋大学, 大学院工学研究科, 助教 (00377863)
• Co-Investigator(Renkei-kenkyūsha): HORI Masaru 名古屋大学, 大学院工学研究科, 教授 (80242824) ; HIRAMATSU Mineo 名城大学, 理工学部, 教授 (50199098) ; ISHIKAWA Kenji 名古屋大学, 大学院工学研究科, 特任教授 (60417384)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: プラズマ / 透過型電子顕微鏡 / グラフェン / その場観察 / X線光電子分光法

Outline of Final Research Achievements

Growth processes and mechanisms of carbon nanowalls (CNW) were investigated. Employing plasma diagnostic techniques and surface composition and structure analyses methods, we developed compact radical source, which can be installed to “Reaction science high-voltage scanning transmission electron microscope” (Nagoya University). And, in-situ observation technique of nanographene nucleation and growth processes at the CNW growth by plasma-enhanced chemical vapor deposition method. Surface composition change and biding structure change were also investigated using X-ray photoelectron spectroscopy. Effects of fluorine and hydroxide radicals exposed to CNW surfaces were clarified. Selective growth of CNW of patterned metal electrodes were also studied.

Free Research Field

プラズマエレクトロニクス