Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stage

2014 Fiscal Year Final Research Report

• Project/Area Number: 24360050
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Tohoku University
• Principal Investigator: GAO Wei 東北大学, 工学(系)研究科(研究院), 教授 (70270816)
• Co-Investigator(Kenkyū-buntansha): SHIMIZU Yuki 東北大学, 大学院工学研究科, 准教授 (70606384) ; ITO So 東北大学, 大学院工学研究科, 助教 (00624818)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: 超精密計測 / 3軸レーザオートコリメータ / 多軸角度計測 / 回折格子 / 超精密位置決め

Outline of Final Research Achievements

To realize next-generation ultra-precision positioning systems having a sub-nanometric positioning accuracy,　a new principle for angle measurement, which is referred to as a three-axis laser autocollimator in this research, has been proposed. A compact micro optical sensor head in a size of 50mmx30mmx30mm has been designed and developed based on the proposed method, and its feasibility has been investigated in experiments. It was verified in experiments that the developed sensor had resolutions of 0.01 arcsecond, 0.01 arcsecond and 0.2 arcsecond for measurement of roll, yaw and pitch motions, respectively. Furthermore, a new method, which is referred to as the edge effect in this research, for detecting position of a focused laser beam has also been proposed. Experimental results revealed that the proposed method could achieve measurement resolution of beyond 0.001arcsecond.

Free Research Field

超精密計測