2014 Fiscal Year Final Research Report
Fabrication of optical polymer waveguide switch using proton beam direct writing technique
Project/Area Number |
24510119
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Research Category |
Grant-in-Aid for Scientific Research (C)
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Allocation Type | Multi-year Fund |
Section | 一般 |
Research Field |
Quantum beam science
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Research Institution | Gunma University |
Principal Investigator |
|
Co-Investigator(Kenkyū-buntansha) |
MIURA Kenta 群馬大学, 大学院理工学府, 准教授 (40396651)
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Project Period (FY) |
2012-04-01 – 2015-03-31
|
Keywords | ポリマー光導波路 / 光スイッチ / プロトンビーム描画 |
Outline of Final Research Achievements |
We demonstrated a PMMA-based thermo-optic switch consisting of a Mach-Zehnder (MZ) type waveguide drawn by proton beam writing (PBW) and working at a wavelength of 1.55 μm. The MZ waveguide was drawn by symmetrically coupling two Y junctions with a core width of 8 μm and a branching angle of 2 deg. A Ti thin-film heater and Al electrodes were formed on the surface of the MZ waveguide using conventional photolithography and wet-etching processes. An optical switching power of 44 mW were obtained from the sample.
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Free Research Field |
光エレクトロニクス
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