高原子番号多価イオンを用いる高効率水の窓Ｘ線帯域放射光源の開発

2014 Fiscal Year Annual Research Report

• Project/Area Number: 24560038
• Research Institution: Utsunomiya University
• Principal Investigator: 東口 武史 宇都宮大学, 工学(系)研究科(研究院), 准教授 (80336289)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: 水の窓軟X線光源 / 重元素 / 多価イオン / レーザー生成プラズマ / 軟X線 / EUV

Outline of Annual Research Achievements

水の窓波長域の軟X線顕微鏡は「生きた」生物細胞などの含水試料が高い空間分解能で観測することが可能である．一方で，この領域の明るい小型光源は未だに実現されておらず，大型装置を使わざるを得ず，研究時間と手法が極めて限定されている．本研究では，高強度レーザーを励起源とするプラズマベースの小型・高効率のバンド放射の水の窓X線フラッシュ光源を実現するための、プラズマ光源を最適化することを目的とした．
重元素プラズマからの放射スペクトルの原子番号依存性を明らかにした．それぞれの最適レーザー強度は異なるが，NdからBiまでの各種ターゲットからのUTA放射スペクトルを観測した．それぞれのスペクトルは約1 nmの帯域幅を有しており，原子番号の増加と共にピーク波長は短波長化した．定性的にはn = 4－n = 4（Δn = 0）遷移のピーク波長は一致している．
水の窓軟X線領域（波長：2.3 ~ 4.4 nm）の積分を放射エネルギーとみなし，放射エネルギーのレーザー強度依存性をまとめた．このとき，時間積分スペクトルは，回折格子の回折効率および背面照射型X線CCDカメラの感度補正も行った．ZrやMoは，Au~Biよりも放射強度は大きいことが分かった．従って，Zrなどは，水の窓軟X線光源の元素の候補になり得ることが分かった．水の窓軟X線顕微鏡に用いることができる可能性がある．
また，原子コードの一つのFACを用いて，Zrの多価イオンのgA 値を計算した．多価イオンでは，水の窓軟X線領域に発光を持つことが分かった．今後は，Cowan, Grasp, HULLACなどの異なる原子コードでも gf や gAを評価し，放射流体シミュレーションに組み込み，実験結果と比較検討を行うことにしている．

Research Products

• [Journal Article] Determination of the polarization states of an arbitrary polarized terahertz beam: Vectorial vortex analysis (2015)
  • Author(s): Toshitaka Wakayama, Takeshi Higashiguchi, Hiroki Oikawa, Kazuyuki Sakaue, Masakazu Washio, Motoki Yonemura, Toru Yoshizawa, J. Scott Tyo, and Yukitoshi Otani
  • Journal Title: Scientific Reports Volume: 5 Pages: 9416 (1-9)
  • DOI: doi:10.1038/srep09416
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Density and x-ray emission profile relationships in highly ionized high-Z laser-produced plasmas (2015)
  • Author(s): Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi et al.
  • Journal Title: Applied Physics Letters Volume: 106 Pages: 121109 (1-4)
  • DOI: http://dx.doi.org/10.1063/1.4916395
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Quasi-Moseley’s law for strong narrow bandwidth soft x-ray sources containing higher charge-state ions (2014)
  • Author(s): Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Yukitoshi Otani, Toyohiko Yatagai, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Weihua Jiang, Akira Endo, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike, and Chihiro Suzuki
  • Journal Title: Applied Physics Letters Volume: 104 Pages: 234107 (1-5)
  • DOI: http://dx.doi.org/10.1063/1.4883475
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Efficient extreme ultraviolet emission from multiple laser-produced one-dimensional spherical plasmas (2014)
  • Author(s): Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, et al.
  • Journal Title: Applied Physics Express Volume: 7 Pages: 086202 (1-4)
  • DOI: http://dx.doi.org/10.7567/APEX.7.086202
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source (2014)
  • Author(s): Amitava Roy, Goki Arai, Hiroyuki Hara, Takeshi Higashiguchi, Hayato Ohashi, Atsushi Sunahara, Bowen Li, Padraig Dunne, Gerry O'Sullivan, Taisuke Miura, Tomas Mocek, and Akira Endo
  • Journal Title: Applied Physics Letters Volume: 105 Pages: 074103 (1-4)
  • DOI: http://dx.doi.org/10.1063/1.4893611
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Enhancement of the extreme ultraviolet emission from a potassium plasma by dual laser irradiation (2014)
  • Author(s): Takeshi Higashiguchi, Mami Yamaguchi, Takamitsu Otsuka, Takeshi Nagata, Hayato Ohashi, Bowen Li, Rebekah D'Arcy, Padraig Dunne, and Gerry O'Sullivan
  • Journal Title: Review of Scientific Instruments Volume: 85 Pages: 096102 (1-3)
  • DOI: http://dx.doi.org/10.1063/1.4894384
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] EUV spectroscopy of highly charged high Z ions in the Large Helical Device plasmas (2014)
  • Author(s): Chihiro Suzuki, Fumihiro Koike, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Hiroyuki Sakaue, Nobuyuki Nakamura, Shigeru Morita, Motoshi Goto, Daiji Kato, Tomohide Nakano, Takeshi Higashiguchi, Colm Harte, and Gerry O'Sullivan
  • Journal Title: Physica Scripta Volume: 89 Pages: 114009 (1-7)
  • DOI: doi:10.1088/0031-8949/89/11/114009
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source (2014)
  • Author(s): Thanh-Hung Dinh, Yuhei Suzuki, Ryouichi Hirose, Hiroyuki Hara, Hayato Ohashi, Padraig Dunne, Gerry O’Sullivan, Atsushi Sunahara, and Takeshi Higashiguchi
  • Journal Title: Review of Scientific Instruments Volume: 85 Pages: 116104 (1-3)
  • DOI: http://dx.doi.org/10.1063/1.4901934
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] 光パラメトリック中赤外レーザーの開発 (2015)
  • Author(s): 川崎 将人，ヂン タンフン，笹沼 淳史，藤井 雄介，三浦 泰祐，東口 武史
  • Organizer: 第15回レーザー学会東京支部研究会
  • Place of Presentation: 東海大学高輪キャンパス
  • Year and Date: 2015-03-05
• [Presentation] 高効率EUV光源のための短パルスCO2レーザーの開発 (2015)
  • Author(s): 笹沼 淳史，ヂン タンフン，荒居 剛己，藤井 雄介，南都 健一郎，中村 大輔，髙橋 昭彦，岡田 龍雄，三浦 泰祐，東口 武史
  • Organizer: 第15回レーザー学会東京支部研究会
  • Place of Presentation: 東海大学高輪キャンパス
  • Year and Date: 2015-03-05
• [Presentation] レーザー生成マイクロプラズマによる高輝度EUV光源の放射特性 (2015)
  • Author(s): 荒居 剛己，原 広行，ヂン タンフン，砂原 淳，三浦 泰祐，遠藤 彰，東口 武史
  • Organizer: 第15回レーザー学会東京支部研究会
  • Place of Presentation: 東海大学高輪キャンパス
  • Year and Date: 2015-03-05
• [Presentation] プラズマEUV光源の高効率化とその応用 (Efficient plasma EUV source and its applicatio (2014)
  • Author(s): 東口 武史 (Takeshi Higashiguchi)
  • Organizer: Plasma Conference 2014 (Plasma 2014
  • Place of Presentation: 朱鷺メッセ
  • Year and Date: 2014-11-21
  • Invited
• [Presentation] LHDプラズマを用いた高Z元素多価イオンのEUV分光と原子モデルの構築 (EUV Spectroscopy and Atomic Model of Highly Charged Ions of High Z Elements Using LHD Plasmas) (2014)
  • Author(s): 鈴木 千尋，村上 泉，小池 文博，田村 直樹，須藤 滋，坂上 裕之，中村 信行，森田 繁，後藤 基志，加藤 太治，仲野 友英，東口 武史，Colm S. Harte，Gerry O'Sullivan
  • Organizer: Plasma Conference 2014 (Plasma 2014
  • Place of Presentation: 朱鷺メッセ
  • Year and Date: 2014-11-21
  • Invited
• [Presentation] Welcome and Overview of recent work on soft-ray emission spectroscopy (2014)
  • Author(s): Gerry O’Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Ragava Lokasani, Elaine Long, Hayato Ohashi, Fergal O’Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
  • Organizer: ISCA Japan-Ireland Workshop on extreme ultraviolet source development for lithography, surface morphology and biological imaging
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-06
  • Invited
• [Presentation] Tunable extreme ultraviolet and soft x-ray narrowband sources with laser produced high-Z plasmas (2014)
  • Author(s): Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Nobuyuki Nakamura, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike, and Chihiro Suzuki
  • Organizer: ISCA Japan-Ireland Workshop on extreme ultraviolet source development for lithography, surface morphology and biological imaging
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-06
• [Presentation] Recent progress in Utsunomiya University: Development of compact, 10-Hz short pulse CO2 laser system for EUV & soft x-ray sources (2014)
  • Author(s): Takeshi Higashiguchi
  • Organizer: ISCA Japan-Ireland Workshop on extreme ultraviolet source development for lithography, surface morphology and biological imaging
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-06
  • Invited
• [Presentation] Sources for Water Window Imaging (2014)
  • Author(s): Gerry O’Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Ragava Lokasani, Elaine Long, Hayato Ohashi, Fergal O’Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-05
  • Invited
• [Presentation] Efficient EUV sources by short CO2 laser-produced plasmas (2014)
  • Author(s): Reiho Amano, Thanh Hung Dinh, Masato Kawasaki, Atsushi Sasanuma, Yuhei Suzuki, Takeshi Higashiguchi, and Taisuke Miura
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] A microplasma high-brightness EUV source at 13.5 nm (2014)
  • Author(s): Goki Arai, Hiroyuki Hara, Yuhei Suzuki, Thanh Hung Dinh, and Takeshi Higashiguchi
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Radiation hydrodynamic simulation of a high-brightness 13.5-nm EUV microplasma (2014)
  • Author(s): Hiroyuki Haya, Goki Arai, Takanori Miyazaki, Thanh-Hung Dinh, Takeshi Higashiguchi, and Atsushi Sunahara
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Quasi-Moseley’s law for UTA spectra in high-Z highly ion charge states for high power EUV & soft x-ray sources (2014)
  • Author(s): Yuhei Suzuki, Goki Arai, Takanori Miyazaki, Thanh-Hung Dinh, and Takeshi Higashiguchi
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Possibility of high-Z plasma water window sources (2014)
  • Author(s): Takanori Miyazaki, Yuhei Suzuki, Thanh Hung Dinh, and Takeshi Higashiguchi
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Characteristics of soft x-ray emission from optically thin high-Z plasmas in Large Helical Device (2014)
  • Author(s): Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike, and Chihiro Suzuki
  • Organizer: 2014 International Workshop on EUV and Soft X-Ray Sources
  • Place of Presentation: University College Dublin
  • Year and Date: 2014-11-04
• [Presentation] Systematic observation of EUV spectra from heavy ions in optically thin and thick plasmas (2014)
  • Author(s): Chihiro Suzuki, Fumihiro Koike, Takeshi Higashiguchi, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Elgiva White, John Sheil, Elaine Long, Fergal O’Reilly, Emma Sokell, Padraig Dunne, and Gerard O’Sullivan
  • Organizer: 9th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA)
  • Place of Presentation: University of Jena
  • Year and Date: 2014-09-22
  • Invited
• [Presentation] Sources for beyond extreme ultraviolet lithography and water window imaging (2014)
  • Author(s): Gerry O'Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Ragava Lokasania, Elaine Long, Hayato Ohashi, Fergal O'Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
  • Organizer: 9th International Conference on Atomic and Molecular Data and Their Applications (ICAMDATA)
  • Place of Presentation: University of Jena
  • Year and Date: 2014-09-22
  • Invited
• [Presentation] 重元素プラズマによるEUV・軟X線光源開発 (2014)
  • Author(s): 東口 武史
  • Organizer: 2014年度 原子分子データ応用フォーラムセミナ
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-09-12
• [Presentation] Tunable narrowband soft x-ray sources with laser-produced high-Z plasmas (2014)
  • Author(s): Hayato Ohashi, Hiroaki Ito, Yuhei Suzuki, Goki Arai, Bowen Li, Gerry O’Sullivan, Fumihiro Koike, Chihiro Suzuki, and Takeshi Higashiguchi
  • Organizer: 5th Euro-Arian Pulsed Power Conference (EAPPC 2014)
  • Place of Presentation: Kumamoto University
  • Year and Date: 2014-09-10
• [Presentation] 重元素による高効率EUV・軟X線プラズマ光源とその応用 (2014)
  • Author(s): 東口 武史
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
  • Invited
• [Presentation] 高輝度EUV光源プラズマの放射流体数値解析 (2014)
  • Author(s): 原 広行，荒居 剛己，鈴木 悠平，廣瀬 僚一，三浦 泰祐，遠藤 彰，ROY Amitava, MOCEK Tomas, 東口 武史，砂原 淳
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
• [Presentation] 重元素プラズマUTA光源の原子番号依存性 (2014)
  • Author(s): 鈴木 悠平，大橋 隼人，荒居 剛己，宮崎 孝基，LI Bowen，DUNNE Padraig，O’SULLIVAN Gerry，鈴木 千尋，田村 直樹，須藤 滋，坂上 裕之，加藤 大治，村上 泉，小池 文博，東口 武史
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
• [Presentation] 光パラメトリック法によるサブナノ秒中赤外レーザーの開発 (2014)
  • Author(s): 川崎 将人，笹沼 淳史，藤井 雄介，天野 玲保，三浦 泰祐，遠藤 彰，MOCEK Tomas，東口 武史
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
• [Presentation] 高効率EUV光源用炭酸ガスレーザー再生増幅器の開発 (2014)
  • Author(s): DINH Thanh Hung，天野 玲保，笹沼 淳史，川崎 将人，藤井 雄介，高橋 昭彦，中村 大輔，岡田 龍雄，三浦 泰祐，遠藤 彰，MOCEK Tomas，東口 武史
  • Organizer: 「プラズマ科学のフロンティア」研究会
  • Place of Presentation: 核融合科学研究所
  • Year and Date: 2014-08-06
• [Presentation] Laser-produced multi-charged heavy ions as efficent soft x-ray sources (2014)
  • Author(s): Takeshi Higashiguchi
  • Organizer: The 5th China-Japan-Korea Joint Seminar on Atomic and Molecular Processes in Plasma (AMPP2014)
  • Place of Presentation: Northwest Normal University
  • Year and Date: 2014-07-31
  • Invited
• [Presentation] 『水の窓』波長域のレーザー生成プラズマ光源の開発 (2014)
  • Author(s): 東口 武史
  • Organizer: 「軟X線による細胞内形態解析」研究会
  • Place of Presentation: 宮城蔵王ロイヤルホテル
  • Year and Date: 2014-07-26
• [Presentation] 重元素によるレーザー生成多価イオンプラズマ光源とその応用 (2014)
  • Author(s): 東口 武史
  • Organizer: 多摩シンポジウム～Tokyo-EBIT 20周年に向けて～
  • Place of Presentation: 電気通信大学
  • Year and Date: 2014-07-05
  • Invited
• [Presentation] Radiation hydrodynamic simulation of a high-brightness 13.5-nm EUV microplasma by use of a dot target (2014)
  • Author(s): Hiroyuki Hara, Goki Arai, Yuhei Suzuki, Hayato Ohashi, Takeshi Higashiguchi, and Atsushi Sunahara
  • Organizer: Photomask Japan 2014
  • Place of Presentation: Pacifico Yokohama
  • Year and Date: 2014-04-15
• [Presentation] Beyond extreme ultraviolet sources for next generation lithography (2014)
  • Author(s): Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, Goki Arai, and Hayato Ohashi
  • Organizer: Photomask Japan 2014
  • Place of Presentation: Pacifico Yokohama
  • Year and Date: 2014-04-15
• [Book] Extreme Ultraviolet Emission from Multi-Charged State Ions in Potassium Plasmas (2015)
  • Author(s): T. Higashiguchi, B. Li, R D'Arcy, P. Dunne and Gerry O'Sullivan
  • Total Pages: 10
  • Publisher: Royal Society of Chemistry