2014 Fiscal Year Final Research Report
Development of Non-contact Conveyance Method of Thin Plate by Using Non-resonance Multiple-Phase Airflow
| Project/Area Number |
24560171
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Multi-year Fund |
|---|
| Section | 一般 |
|---|
| Research Field |
Design engineering/Machine functional elements/Tribology
|
|---|
| Research Institution | Toyota Technological Institute |
|---|
Principal Investigator |
|
|---|
| Project Period (FY) |
2012-04-01 – 2015-03-31
|
| Keywords | 空気流 / 非接触 / 薄板 / 搬送 / 多相 |
|---|
| Outline of Final Research Achievements |
Non-contact transfer methods are required for glass plates and semiconductor wafers while keeping them clean. In the proposed transfer method, a thin plate was slightly tilted by blowing and sucking air from orifice restrictors and airflow is blown against the lower side of the plate so that the driving force is generated. Two patterns were found experimentally. The plate was continuously carried by shifting the airflow pattern in accordance with the plate position. Forty eight slots to supply airflow were arranged with an interval of 15 mm. A stainless steel plate with dimensions of 90 mm ×100 mm ×2 mm and 139 g was transferred at an acceleration of 15 mm/s/s.
|
| Free Research Field |
機械工学
|
