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2014 Fiscal Year Final Research Report

Development of 3D-shape measurement technique of an electronic substrate with electronic parts

Research Project

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Project/Area Number 24560289
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionKanazawa University

Principal Investigator

ADACHI masaaki  金沢大学, 機械工学系, 教授 (50212519)

Project Period (FY) 2012-04-01 – 2015-03-31
Keywords3次元形状計測 / スペックル干渉計 / 位相抽出 / ランダム振動 / 波長可変レーザー / 位相シフト
Outline of Final Research Achievements

We have developed a 3D-shape measurement technique of an electronic substrate with electronic parts using a wavelength variable laser. In the technique many speckle interferograms are captured under small random vibrations in environment. These vibrations would make phase shifts between the captured interferograms random. Amounts of these shifts are calculated through Max & Min light intensities searchings at two different pixels in frames and twin normalizations of their intensity changes. The calculated shifts and light-intensity changes at pixels are used to extract phase distribution with the Least-Squares Algorithm. During the laser wavelength is varied from 778.20nm to 780.28nm, 140 specklegrams are captured, and phase distributions are extracted regarding 7 different wavelengths. The ratios of phase change against wavelength change are extracted at all pixels of the frame. 3D shape is then calculated from the obtained ratios.

Free Research Field

計測工学

URL: 

Published: 2016-06-03  

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