Lab-on-a-chip using compound semiconductor nanowires and a CMOS substrate

2014 Fiscal Year Final Research Report

• Project/Area Number: 24560414
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Sophia University
• Principal Investigator: WAHO Takao 上智大学, 理工学部, 教授 (90317511)
• Research Collaborator: SHIMOMURA Kazuhiko 上智大学, 理工学部, 教授 ; PROST Werner Duisburg-Essen大学 ; MICHIMATA Kenji 元上智大学大学院 ; MATSUSHIBA Ryo 元上智大学大学院 ; OHARA Kazuma 上智大学大学院 ; SHIMAMOTO Issei 上智大学大学院 ; YAMAZAKI Yuusuke 上智大学大学院
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: ナノワイヤ / ΔΣ変調器 / A/D変換器 / ラボオンチップ / センサ

Outline of Final Research Achievements

A 2nd-order delta-sigma modulator based on novel dynamic common-source integrators was designed by using 0.35-micron CMOS technology. The low-power operation was demonstrated with a bandwidth of 20 kHz and an effective-number-of-bit (ENOB) of 11.5 bits. A lab-on-a-chip was then fabricated by integrating InAs nanowires with a delta-sigma modulator on the same Si chip. The field-assisted self-assembly was used in the integration process. The nanowire resistance was measured digitally by the modulator. Characteristic responses against acetone, methanol, and water were obtained, indicating a high potential as a low-power and high-sensitive chemical sensor.

Free Research Field

半導体デバイス、集積回路