Development of highly accurate non-contact object profiling system by using optical frequency-swept laser source

2014 Fiscal Year Final Research Report

• Project/Area Number: 24560517
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Measurement engineering
• Research Institution: Kanazawa University
• Principal Investigator: IIYAMA Koichi 金沢大学, 電子情報学系, 教授 (90202837)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: 光干渉計測 / FMCW / 距離計測 / 物体形状計測 / レーザの周波数変調

Outline of Final Research Achievements

Optical ranging system with 100um measurement accuracy has been developed by utilizing FMCW sensing system using an optical frequency-swept laser source. The measurement accuracy of the system is seriously affected by nonlinearity in the optical frequency sweep. Highly accurate measurement system with the standard deviation of less than 10um was realized by developing synchronous sampling method to eliminate the effect of nonlinear optical frequency sweep and by applying interpolation to measurement result. The developed system is then used for three-dimensional object profiling, and we have succeeded profiling of objects such as coins with the steps less than 150um.
In addition, we have developed a method to modify and optimize modulation waveform of a laser to achieve linear optical frequency sweep.

Free Research Field

光電子計測工学