manufacturing of nano pores for handling of a DNA molecule

2013 Fiscal Year Final Research Report

• Project/Area Number: 24651114
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Single-year Grants
• Research Field: Nanostructural science
• Research Institution: Kyoto University
• Principal Investigator: KIMURA Kenji 京都大学, 工学(系)研究科(研究院), 教授 (50127073)
• Co-Investigator(Kenkyū-buntansha): HASEGAWA Masataka 産業技術研究所, 主任研究員 (20357776) ; NAKAJIMA Kaoru 京都大学, 大学院工学研究科, 助教 (80293885) ; NARUMI Kazumasa 日本原子力研究開発機構, 主幹研究員 (90354927)
• Project Period (FY): 2012-04-01 – 2014-03-31
• Keywords: ナノ細孔 / フラーレンイオン

Research Abstract

Amorphous silicon nitride (SiN) films (thickness 20 nm) were irradiated with 120 - 5000 keV C60 ions and observed using transmission electron microscopy (TEM). The ion tracks produced by the irradiation were clearly observed by TEM. For semi-quantitative analysis the ion tracks were also observed using high-angle annular dark field scanning transmission electron microscopy. The density of the track was found to be reduced by 30%.
The sputtering yield of SiN bombarded with 540 keV C60 ions was measured using high-resolution Rutherford backscattering spectroscopy. The yield is as large as 5400. These results suggest that nano pores may be directly produced in the SiN film by optimizing the irradiation conditions.

Research Products

• [Journal Article] Transmission secondary ion mass spectrometry using 5MeV C_<60>^+ ions (2014)
  • Author(s): K. Nakajima, K. Nagano, M. Suzuki, K. Narumi, Y. Saitoh, K. Hirata, and K. Kimura
  • Journal Title: Appl. Phys. Lett Volume: 104 Pages: 114103
• [Journal Article] Surface effect on ion track formation in amorphous Si3N4 films (2013)
  • Author(s): Y. Morita, K. Nakajima, M. Suzuki, K. Narumi, Y. Saitoh, N. Ishikawa, K. Hojou, M. Tsujimoto, S. Isoda and K. Kimura
  • Journal Title: Nucl. Instr. and Methods B Volume: 315 Pages: 142-145
• [Journal Article] Direct Observation of Fine Structure in Ion Tracks in Amorphous Si3N4 by TEM (2012)
  • Author(s): K. Nakajima, Y. Morita, M. Suzuki, K. Narumi, Y. Saitoh, N. Ishikawa, K. Hojou, M. Tsujimoto, S. Isoda and K. Kimura
  • Journal Title: Nucl. Instr. and Methods B Volume: 291 Pages: 12-16
• [Presentation] 540 keV C_<60>^<2+>照射による非晶質SiNのスパッタリング (2014)
  • Author(s): 北山巧,森田陽亮,中嶋薫,鈴木基史,木村健二,鳴海一雅,斎藤勇一,松田誠,左高正雄,辻本将彦,磯田正二
  • Organizer: 日本物理学会第69回年次大会
  • Place of Presentation: 東海大学湘南キャンパス
  • Year and Date: 2014-03-28
• [Presentation] C_<60>イオン照射によって形成された非晶質SiN薄膜中のイオントラックの膜厚依存性 (2013)
  • Author(s): 中嶋薫,森田陽亮,北山巧,鈴木基史,木村健二,鳴海一雅,斎藤勇一,辻本将彦,磯田正二
  • Organizer: 日本物理学会2013年秋季大会
  • Place of Presentation: 徳島大学
  • Year and Date: 2013-09-26
• [Presentation] 非晶質Si_3N_4薄膜中のイオントラックのHAADF-STEM観察 (2013)
  • Author(s): 森田陽亮,中嶋薫,鈴木基史,木村健二,鳴海一雅,斎藤勇一,辻本政彦,磯田正二
  • Organizer: 日本物理学会第68回年次大会
  • Place of Presentation: 広島大学
  • Year and Date: 2013-03-27
• [Presentation] Direct Observation of Fine Structure in Ion Tracks in Amorphous Thin Films by TEM (2012)
  • Author(s): Y. Morita, K. Nakajima, M. Suzuki, K. Kimura, K. Narumi, Y. Saitoh, N. Ishikawa, K. Hojou, M. Tsujimoto, S. Isoda
  • Organizer: 25^<th> International Conference on Atomic Collisions in Solids
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2012-10-23
• [Presentation] Ion Tracks Produced by Sub-MeV C60 Ions in Amorphous Si_3N_4 (2012)
  • Author(s): Y. Morita, K. Nakajima, M. Suzuki, K. Narumi, Y. Saitoh, N. Ishikawa, K. Hojou, M. Tsujimoto, S. Isoda, K. Kimura
  • Organizer: 19^<th> International Workshop on Inelastic Ion-Surface Collisions
  • Place of Presentation: Frauenchiemsee, Germany
  • Year and Date: 2012-09-18