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2013 Fiscal Year Final Research Report

Research of MEMS micro ion source using ion liquid

Research Project

  • PDF
Project/Area Number 24651157
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Microdevices/Nanodevices
Research InstitutionTohoku University

Principal Investigator

KUWANO Hiroki  東北大学, 工学(系)研究科(研究院), 教授 (50361118)

Co-Investigator(Kenkyū-buntansha) HARA Motoaki  東北大学, 大学院工学研究科, 准教授 (00417966)
Project Period (FY) 2012-04-01 – 2014-03-31
Keywordsマイクロファブリケーション
Research Abstract

We succeeded a fabrication of focused micro ion source array using micromachining technologies. Our micro ion source has below than 50 nm in tip radius, 50 um in emitter radius, and 150 um in emitter height. Twenty five (5x5) micro ion sources were fabricated by butch processing in the area 4 mm2. Micro ion beam of ion liquid (EMIM-BF4) was confirmed. By using Quadra pole mass spectroscopy, it is shown that our micro ion beam etches Si substrate reactively.

  • Research Products

    (4 results)

All 2014 2013 Other

All Presentation (2 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Presentation] Cconcurrent reactive ion etching employing micromachined ionic liquid ion source array2014

    • Author(s)
      Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Tatsuya Suzuki, and Hiroki Kuwano
    • Organizer
      Proc. IEEE MEMS Conference 2014
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      20140126-30
  • [Presentation] Ionic-liquid micro ion source array for flexible concurrent MEMS process2013

    • Author(s)
      Tatsuya Suzuki, Motoaki Hara, Hiroyuki Oguchi, and Hiroki Kuwano
    • Organizer
      Proc. IEEE MEMS Conference 2013
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      20130120-24
  • [Remarks]

    • URL

      http://www.nanosys.mech.tohoku.ac.jp/research/research.html

  • [Patent(Industrial Property Rights)] イオン源および集束イオンビーム装置2013

    • Inventor(s)
      鈴木達也、原基揚、大口裕之、桑野 博喜
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Rights Type
      特許2013-092614
    • Industrial Property Number
      2013-092614
    • Filing Date
      2013-04-25
    • Overseas

URL: 

Published: 2015-06-25  

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