単電子・スピンデバイスの高温動作を可能にするためのナノフリーザ基板の開発

2014 Fiscal Year Annual Research Report

• Project/Area Number: 24651168
• Research Institution: Shizuoka University
• Principal Investigator: 池田 浩也 静岡大学, 電子工学研究所, 准教授 (00262882)
• Co-Investigator(Kenkyū-buntansha): 早川 泰弘 静岡大学, 電子工学研究所, 教授 (00115453) ; 下村 勝 静岡大学, 工学(系)研究科(研究院), 准教授 (20292279)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Keywords: 量子効果デバイス / ペルチェ冷却 / ナノワイヤ / 熱電変換

Outline of Annual Research Achievements

本研究は，量子効果デバイスを高温動作可能にするためのペルチェ冷却基板の開発を目指している．本年度得られた主な成果を以下に示す．
（１）混晶膜にすることにより熱伝導率の低減が期待できるが，同時にゼーベック係数を保つことが必要となるため，SiGe混晶のゼーベック係数の解明を行った．p型のSi，Ge，およびSiGe混晶のゼーベック係数の測定データと理論計算値を用いて，フォノンドラッグ効果がフォノン速度，フォノンの平均自由行程，格子散乱に起因するキャリア移動度により決定されることを明らかにした．さらにこの結果に基づいて，SiとGeの物性パラメータを内挿することにより，SiGe混晶のゼーベック係数が予測できることを見出した．
（２）Siナノワイヤサーモパイル作製プロセスを開発するために，収束イオンビーム（FIB）によるn型SOI（Si on insulator）層へのGaイオン注入を行い，Siナノワイヤサーモパイルの作製を進めている．Geドープによるp型Siの形成を確認し，そのゼーベック係数について，フォノン輸送の観点から解析を行った．共ドープ効果よりはむしろ，サイズ効果が現れることを見出した．
（３）混晶膜や共ドープによる熱伝導率の低減が期待されるため，ナノワイヤ材料の熱伝導特性を精度よく測定する新しい技術を開発している．提案する手法では，電子線による周期加熱と赤外線センサによる温度変化検出を用いるため，非接触かつ非破壊で試料の熱伝導特性を計測できる．昨年度構築した，ハロゲン加熱による同じ原理の装置を用いて得られたバルクSiおよびバルクCuの熱拡散率が，報告値とほぼ一致することを確認し，この非接触法によりバルク材料の熱拡散率を測定できることを示した．現在は，測定精度の更なる向上を目指して，改良を含めた実験装置の再構築を行っている．

Research Products

• [Journal Article] 高効率熱電変換デバイス用SiGe混晶のゼーベック係数 (2015)
  • Author(s): 池田浩也，ベラッパン・マニムス，ムスサミ・オンプラカシュ，鈴木悠平，ファイズ・サレ，ムカンナン・アリバナンドハン，鎌倉良成，早川泰弘
  • Journal Title: 信学技報 Volume: ED2014-139, SDM2014-148 Pages: 7-11
  • Acknowledgement Compliant
• [Journal Article] High power factor of Ga-doped compositionally homogeneous Si0.68Ge0.32 bulk crystal grown by the vertical temperature gradient freezing method (2015)
  • Author(s): M. Omprakash, M. Arivanandhan, T. Koyama, Y. Momose, H. Ikeda, H. Tatsuoka, D. Aswal, S. Bhattacharya, Y. Okano, T. Ozawa, Y. Inatomi, S.M. Babu, Y. Hayakawa
  • Journal Title: Journal of Crystal Growth & Design Volume: 15 Pages: 1380-1388
  • DOI: 10.1021/cg501776h
  • Peer Reviewed
• [Journal Article] Construction of a novel method of measuring thermal conductivity for nanostructures (2015)
  • Author(s): H. Ikeda, S. Yoshida, Y. Suzuki, V. Maninuthu, F. Salleh, F. Kuwahara, M. Shimomura, K. Murakami
  • Journal Title: MAKARA Journal of Technology Series Volume: 19 Pages: in press
  • Peer Reviewed
• [Journal Article] Phonon-drag contribution to Seebeck coefficient of Ge-on-insulator substrate fabricated by wafer bonding process (2015)
  • Author(s): V. Manimuthu, S. Yoshida, Y. Suzuki, F. Salleh, M. Arivanandhan, Y. Kamakura, Y. Hayakawa, H. Ikeda
  • Journal Title: MAKARA Journal of Technology Series Volume: 19 Pages: in press
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Seebeck coefficient of SOI layer induced by phonon transport (2015)
  • Author(s): F. Salleh, T. Oda, Y. Suzuki, Y. Kamakura, H. Ikeda
  • Journal Title: MAKARA Journal of Technology Series Volume: 19 Pages: in press
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Study on phonon drag effect and phonon transport in thin Si-on-insulator layers (2015)
  • Author(s): H. Ikeda, T. Oda, Y. Suzuki, Y. Kamakura, F. Salleh
  • Journal Title: Advanced Materials Research Volume: in press Pages: in press
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Phonon-drag contribution to Seebeck coefficient of Ge- and Si-on-insulator layers (2015)
  • Author(s): V. Manimuthu, M. Omprakash, Y. Suzuki, F. Salleh, M. Arivanandhan, Y. Kamakura, Y. Hayakawa, H. Ikeda
  • Journal Title: Advanced Materials Research Volume: in press Pages: in press
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Phonon drag effect on Seebeck coefficient of ultrathin P-doped Si-on-insulator layers (2014)
  • Author(s): F. Salleh, T. Oda, Y. Suzuki, Y. Kamakura, H. Ikeda
  • Journal Title: Applied Physics Letters Volume: 105 Pages: 102104-1-4
  • DOI: http://dx.doi.org/10.1063/1.4895470
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] Seebeck coefficient of poly-crystalline SiGe and its phonon-drag contribution (2015)
  • Author(s): V. Manimuthu, M. Omprakash, Y. Suzuki, F. Salleh, M. Arivanandhan, Y. Kamakura, Y. Hayakawa, H. Ikeda
  • Organizer: 19th National Seminar on Crystal Growth
  • Place of Presentation: Chennai, India
  • Year and Date: 2015-03-12 – 2015-03-14
• [Presentation] 基板貼り合わせ法で作製したp型GOI層のゼーベック係数 (2015)
  • Author(s): 池田浩也，ベラッパン・マニムス，ムスサミ・オムプラカシュ，鈴木悠平，ファイズ・サレ，ムカンナン・アリバナンドハン，鎌倉良成，早川泰弘
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学（神奈川県，平塚市）
  • Year and Date: 2015-03-11 – 2015-03-14
• [Presentation] 共ドープナノ構造SOI層のゼーベック係数に関する考察 (2015)
  • Author(s): 鈴木悠平，ファイズ・サレ，下村勝，鎌倉良成，池田浩也
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学（神奈川県，平塚市）
  • Year and Date: 2015-03-11 – 2015-03-14
• [Presentation] Effect of phonon boundary scattering on Seebeck coefficient in silicon thin films (2015)
  • Author(s): Indra Nur Adisusilo, Faiz Salleh, Hiroya Ikeda, Yoshinari Kamakura
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学（神奈川県，平塚市）
  • Year and Date: 2015-03-11 – 2015-03-14
• [Presentation] Thermoelectric properties of compositionally homogeneous p and n-type SiGe bulk crystals (2015)
  • Author(s): M.Omprakash, M.Arivanandhan, T.Koyama, Y.Momose, H.Ikeda, H.Tatsuoka, Y.Okano, T.Ozawa, Y. Inatomi, S. Bhattacharya, D.K. Aswal, S.M. Babu, Y. Hayakawa
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 東海大学（神奈川県，平塚市）
  • Year and Date: 2015-03-11 – 2015-03-14
• [Presentation] 高効率熱電変換デバイス用SiGe混晶のゼーベック係数 (2015)
  • Author(s): 池田浩也，ベラッパン・マニムス，ムスサミ・オンプラカシュ，鈴木悠平，ファイズ・サレ，ムカンナン・アリバナンドハン，鎌倉良成，早川泰弘
  • Organizer: 電子情報通信学会ED研・SDM研合同２月研究会
  • Place of Presentation: 北海道大学（北海道，札幌市）
  • Year and Date: 2015-02-05 – 2015-02-06
• [Presentation] Contribution of phonon and carrier transport to Seebeck coefficient in ultrashin SOI layer (2015)
  • Author(s): F. Salleh, T. Oda, Y. Suzuki, Y. Kamakura, H. Ikeda
  • Organizer: 2015 International Symposium Toward the Future of Advanced Researches
  • Place of Presentation: Shizuoka Univ.（Hamamatsu, Shizuoka）
  • Year and Date: 2015-01-27 – 2015-01-28
• [Presentation] Phonon-drag contribution to Seebeck coefficient of p-type Si, Ge and SiGe (2015)
  • Author(s): V. Manimuthu, M. Omprakash, Y. Suzuki, F. Salleh, M. Arivanandhan, Y. Kamakura, Y. Hayakawa, H. Ikeda
  • Organizer: 2015 International Symposium Toward the Future of Advanced Researches
  • Place of Presentation: Shizuoka Univ.（Hamamatsu, Shizuoka）
  • Year and Date: 2015-01-27 – 2015-01-28
• [Presentation] Growth of compositionally homogeneous p-type SiGe bulk and thermoelectric properties (2015)
  • Author(s): M.Omprakash, M.Arivanandhan, T.Koyama, Y.Momose, H.Ikeda, H.Tatsuoka, D.K. Aswal, S. Bhattacharya, Y.Okano, T.Ozawa, Y. Inatomi, S.M. Babu, Y. Hayakawa
  • Organizer: 2015 International Symposium Toward the Future of Advanced Researches
  • Place of Presentation: Shizuoka Univ.（Hamamatsu, Shizuoka）
  • Year and Date: 2015-01-27 – 2015-01-28
• [Presentation] Construction of a novel method of measuring thermal conductivity for nanostructures (2014)
  • Author(s): H. Ikeda, S. Yoshida, Y. Suzuki, V. Maninuthu, F. Salleh, F. Kuwahara, M. Shimomura, K. Murakami
  • Organizer: 2nd International Conference on Nano Electronics Research and Education (ICNERE2014)
  • Place of Presentation: Shizuoka Univ.（Hamamatsu, Shizuoka）
  • Year and Date: 2014-11-24 – 2014-11-26
• [Presentation] Phonon-drag contribution to Seebeck coefficient of Ge-on-insulator substrate fabricated by wafer bonding process (2014)
  • Author(s): V. Manimuthu, S. Yoshida, Y. Suzuki, F. Salleh, M. Arivanandhan, Y. Kamakura, Y. Hayakawa, H. Ikeda
  • Organizer: 2nd International Conference on Nano Electronics Research and Education (ICNERE2014)
  • Place of Presentation: Shizuoka Univ.（Hamamatsu, Shizuoka）
  • Year and Date: 2014-11-24 – 2014-11-26
• [Presentation] Seebeck coefficient of SOI layer induced by phonon transport (2014)
  • Author(s): F. Salleh, T. Oda, Y. Suzuki, Y. Kamakura, H. Ikeda
  • Organizer: 2nd International Conference on Nano Electronics Research and Education (ICNERE2014)
  • Place of Presentation: Shizuoka Univ.（Hamamatsu, Shizuoka）
  • Year and Date: 2014-11-24 – 2014-11-26
• [Presentation] Contribution of phonon transport to Seebeck coefficient of P-doped SOI layer (2014)
  • Author(s): F. Salleh, T. Oda, Y. Suzuki, Y. Kamakura, H. Ikeda
  • Organizer: 16th Takayanagi Memorial Symposium
  • Place of Presentation: Shizuoka Univ.（Hamamatsu, Shizuoka）
  • Year and Date: 2014-11-11 – 2014-11-12
• [Presentation] Study on Seebeck coefficient of germanium-on-insulator for high-sensitive infrared photodetectors (2014)
  • Author(s): V. Manimuthu, S. Yoshida, Y. Suzuki, F. Salleh, M. Arivanandhan, Y. Kamakura, Y. Hayakawa, H. Ikeda
  • Organizer: 16th Takayanagi Memorial Symposium
  • Place of Presentation: Shizuoka Univ.（Hamamatsu, Shizuoka）
  • Year and Date: 2014-11-11 – 2014-11-12
• [Presentation] Thermoelectric characteristics of Si- and Ge-on-insulator layers for predicting those of SiGe nanostructures (2014)
  • Author(s): V. Manimuthu, S. Yoshida, Y. Suzuki, F. Salleh, M. Arivanandhan, Y. Kamakura, Y. Hayakawa, H. Ikeda
  • Organizer: 7th Forum on the Science and Technology of Silicon Materials
  • Place of Presentation: Congress Center（Hamamatsu, Shizuoka）
  • Year and Date: 2014-10-19 – 2014-10-22
• [Presentation] Phonon drag effect on Seebeck coefficient in thin Si-on-insulator layer (2014)
  • Author(s): H. Ikeda, T. Oda, Y. Suzuki, F. Salleh, Y. Kamakura
  • Organizer: 12th European Conference on Thermoelectrics
  • Place of Presentation: Madrid, Spain
  • Year and Date: 2014-09-24 – 2014-09-26
• [Presentation] Seebeck coefficient of thin SOI layer co-doped with Ga and P atoms (2014)
  • Author(s): Y. Suzuki, F. Salleh, M. Shimomura, Y. Kamakura, H. Ikeda
  • Organizer: 12th European Conference on Thermoelectrics
  • Place of Presentation: Madrid, Spain
  • Year and Date: 2014-09-24 – 2014-09-26
• [Presentation] Thermoelectric properties of compositionally homogeneous Ga-doped SiGe bulk crystals (2014)
  • Author(s): Y. Hayakawa, M. Omprakash, M. Arivanandhan, T. Koyama, Y. Momose, H. Ikeda, H. Tatsuoka, Y. Okano, T. Ozawa, Y. Inatomi, S.M. Babu
  • Organizer: 12th European Conference on Thermoelectrics
  • Place of Presentation: Madrid, Spain
  • Year and Date: 2014-09-24 – 2014-09-26
• [Presentation] PドープSOI層のゼーベック係数におけるフォノンドラッグ効果 (2014)
  • Author(s): ファイズ・サレ，織田琢郎，鈴木悠平，鎌倉良成，池田浩也
  • Organizer: 第75回応用物理学会秋季学術講演会
  • Place of Presentation: 北海道大学（北海道，札幌市）
  • Year and Date: 2014-09-17 – 2014-09-20
• [Presentation] Phonon-drag contribution to Seebeck coefficient of Ge- and Si-on-insulator layers (2014)
  • Author(s): V. Manimuthu, S. Yoshida, Y. Suzuki, F. Salleh, M. Arivanandhan, Y. Kamakura, Y. Hayakawa, H. Ikeda
  • Organizer: 13th International Conference on Global Research and Education (InterAcademia 2014)
  • Place of Presentation: Riga, Latvia
  • Year and Date: 2014-09-10 – 2014-09-12
• [Presentation] Study on phonon drag effect and phonon transport in thin Si-on-insulator layers (2014)
  • Author(s): H. Ikeda, T. Oda, Y. Suzuki, Y. Kamakura, F. Salleh
  • Organizer: 13th International Conference on Global Research and Education (InterAcademia 2014)
  • Place of Presentation: Riga, Latvia
  • Year and Date: 2014-09-10 – 2014-09-12
• [Presentation] In-situ observation of dissolution and growth processes of Si1-xGex under different temperature gradients (2014)
  • Author(s): M. Omprakash, M. Arivanandhan, T. Koyama, Y. Momose, H. Ikeda, H. Tatsuoka, Y. Okano, T. Ozawa, Y. Inatomi, S.M. Babu, Y. Hayakawa
  • Organizer: 13th International Conference on Global Research and Education (InterAcademia 2014)
  • Place of Presentation: Riga, Latvia
  • Year and Date: 2014-09-10 – 2014-09-12
• [Presentation] Seebeck-coefficient control of ultrathin SOI layers and its novel characterization technique (2014)
  • Author(s): H. Ikeda, Y. Suzuki, F. Salleh
  • Organizer: Peradeniya University International Research Sessions (iPURSE)
  • Place of Presentation: Candy, Sri Lankan
  • Year and Date: 2014-07-04 – 2014-07-05
  • Invited
• [Presentation] Contribution of phonon-drag effect to Seebeck coefficient of ultrathin Si-on-insulator layers (2014)
  • Author(s): F. Salleh, T. Oda, Y. Suzuki, Y. Kamakura, H. Ikeda
  • Organizer: 2014 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD2014)
  • Place of Presentation: Kanazawa Bunka Hall（Kanazawa, Ishikawa）
  • Year and Date: 2014-07-01 – 2014-07-03
• [Presentation] Seebeck coefficient of germanium-on-insulator for high-sensitive infrared photodetectors (2014)
  • Author(s): V. Manimuthu, S. Yoshida, Y. Suzuki, F. Salleh, M. Arivanandhan, Y. Kamakura, Y. Hayakawa, H. Ikeda
  • Organizer: 2014 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD2014)
  • Place of Presentation: Kanazawa Bunka Hall（Kanazawa, Ishikawa）
  • Year and Date: 2014-07-01 – 2014-07-03
• [Presentation] 極薄SOI膜のゼーベック係数制御とナノ構造熱電特性測定技術の構築 (2014)
  • Author(s): 池田浩也
  • Organizer: 奈良先端科学技術大学院大学研究会
  • Place of Presentation: 奈良先端科学技術大学院大学（奈良県，奈良市）
  • Year and Date: 2014-06-13 – 2014-06-13
  • Invited
• [Remarks] 静大 電子工学研究所 池田研究室
  • URL: http://nanote.eng.shizuoka.ac.jp/~ikedalab/index.html