2013 Fiscal Year Final Research Report
Vacuum gauge available from high vacuum to beyond atmospheric pressure based on leakage of surface acoustic wave propagating on ball to surrounding gases.
| Project/Area Number |
24656060
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Single-year Grants |
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| Research Field |
Applied physics, general
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| Research Institution | Tohoku University |
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Principal Investigator |
YAMANAKA Kazushi 東北大学, 工学(系)研究科(研究院), 教授 (00292227)
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| Co-Investigator(Kenkyū-buntansha) |
TSUJI Toshihiro 東北大学, 大学院工学研究科, 助教 (70374965)
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Keywords | 弾性表面波 / 漏洩減衰 / SAWセンサ / 真空計 / 圧力計 |
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| Research Abstract |
The pressure dependence of the leaky attenuation was measured using ultra-long propagation of naturally collimated surface acoustic wave (SAW) in a ball SAW device and the realization of the vacuum gauge available from beyond atmospheric pressure was attempted. The ball SAW device with an interditgital transducer of Al film, useful for suppressing the scattering, succeeded in measuring the waveform after propagating 1 m by S/N of 20 at 100 kPa in N2. Moreover, precise measurement of the attenuation was succeeded by fitting an amplitude decay curve to an exponential function. The leaky attenuation is measured by subtracting extraneous attenuation independent of the pressure. As a result, it was observed that the pressure dependence was linear in the pressure range from 300 kPa down to 0.03 kPa. From these results, the foundation of the pressure gauge available beyond atmospheric pressure was established based on the measurement of the leaky attenuation by the ball SAW device.
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[Journal Article] SiOx膜を用いたボールSAWセンサによる高感度微量水分測定システムの開発2014
Author(s)
萩原啓, 大場俊弘, 小清水秀和, 辻俊宏, 大泉透, 竹田宣生, 赤尾慎吾, 大木恒郎, 高柳浩介, 柳沢恭行, 中曽教尊, 塚原祐輔, 山中一司
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Journal Title
圧電材料・デバイスシンポジウム2014講演論文集
Pages: 47-52
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[Journal Article] Highly Sensitive Trace Moisture Ball SAW Sensor Using SiOx film2013
Author(s)
Satoshi Hagihara, Toshihiro Tsuji, Toru Oizumi, Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Kosuke Takayaangi, Takayuki Yangisawa, Noritaka Nakaso, Yusuke Tsukahara, Kazushi Yamanaka
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Journal Title
Proceedings of Symposium on Ultrasonic Electronics
Volume: Vol.34(2013)
Pages: 381-382
Peer Reviewed
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[Journal Article] Pd-Pt合金膜を用いたボールSAWセンサによる水素の高感度計測2013
Author(s)
辻俊宏, 三原亮祐, 齋藤智弘, 萩原啓, 大泉透, 竹田宣生, 大木恒郎, 柳沢恭行, 赤尾慎吾, 中曽教尊, 山中一司
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Journal Title
圧電材料・デバイスシンポジウム2013講演論文集
Pages: 85-86
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[Presentation] 微量水分計測のためのボールSAWセンサシステムの高度化2014
Author(s)
辻俊宏, 萩原啓, 大場俊弘, 小清水秀和, 大泉透, 竹田宣生, 赤尾慎吾, 大木恒郎, 高柳浩介, 柳沢恭行, 中曽教尊, 塚原祐輔, 山中一司
Organizer
第61回応用物理学会春季学術講演会
Place of Presentation
青山学院大学相模原キャンハ?ス(神奈川)
Year and Date
2014-03-18
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[Presentation] SiOx膜を用いたボールSAWセンサによる高感度微量水分測定システムの開発2014
Author(s)
萩原啓, 大場俊弘, 小清水秀和, 辻俊宏, 大泉透, 竹田宣生, 赤尾慎吾, 大木恒郎, 高柳浩介, 柳沢恭行, 中曽教尊, 塚原祐輔, 山中一司
Organizer
圧電材料・デバイスシンポジウム2014
Place of Presentation
東北大学(宮城県)
Year and Date
2014-01-29
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[Presentation] Fast and sensitive H2 detection by ball surface acoustic wave (SAW) sensor with porous Pd-Pt alloy film2013
Author(s)
Toshihiro Tsuji, Ryosuke Mihara, Tomohiro Saito, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi,Takayuki Yanagisawa, Shingo Akao,Noritaka Nakaso,Kazushi Yamanaka
Organizer
2013 Joint UFFC, EFTF and PFM Symposium
Place of Presentation
Prague Congress Center (Prague Czech Republic)
Year and Date
2013-07-25
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[Presentation] Response of quartz ball surface acoustic wave (SAW) sensor to trace moisture,2013 Joint UFFC2013
Author(s)
Kazushi Yamanaka, Satoshi Hagihara, Tomohiro Saito,Oizumi Oizumi,Nobuo Takeda,Shigo Akao,Kosuke Takayanagi, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Toshihiro Tsuji
Organizer
EFTF and PFM Symposium
Place of Presentation
Prague Congress Center(Prague Czech Republic)
Year and Date
2013-07-24
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[Presentation] Highly Sensitive Ball SAW Hydrogen Sensor with Porous Pd Alloy Film2013
Author(s)
Toshihiro Tsuji,Ryosuke Mihara, Tomohiro Saito,Satoshi Hagihara,Toru Oizumi,Nobuo Takeda,Tsuneo Ohgi, Takayuki Yanagisawa, Shingo Akao,Noritaka Nakaso, and Kazushi Yamanaka
Organizer
3rd International Symposium on Laser Ultrasonics and Advanced Sensing
Place of Presentation
Yokohama Red Brick Warehouse (Kanagawa,Japan)
Year and Date
2013-06-27
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[Presentation] Pd-Pt合金膜を用いたボールSAWセンサによる空気中水素の測定2013
Author(s)
辻俊宏, 三原亮祐, 齋藤智弘, 萩原啓, 大泉透, 竹田宣生, 大木恒郎, 柳沢恭行, 赤尾慎吾, 中曽教尊, 山中一司
Organizer
第60回応用物理学会春季学術講演会
Place of Presentation
神奈川工科大学(神奈川県)
Year and Date
2013-03-29
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[Presentation] Pd-Pt合金膜を用いたボールSAWセンサによる水素の高感度計測2013
Author(s)
辻俊宏, 三原亮祐, 齋藤智弘, 萩原啓, 大泉透, 竹田宣生, 大木恒郎, 柳沢恭行, 赤尾慎吾, 中曽教尊, 山中一司
Organizer
圧電材料・デバイスシンポジウム2013
Place of Presentation
東北大学(宮城県)
Year and Date
2013-01-28
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[Presentation] Frequency Dependence Analysis of Ball SAW Sensor's Response2012
Author(s)
Toshihiro Tsuji, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Shingo Akao, Kosuke Takayanagi, Tsuneo Ohgi, Takayuki Yanagisawa, Noritaka Nakaso, Kazushi Yamanaka
Organizer
The 33rd Symposium on Ultrasonic Electronics USE2012
Place of Presentation
Chiba University (Chiba,Japan)
Year and Date
2012-11-13
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